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This page displays recent announcements and updates for the Lurie Nanofabrication Facility. Links to archived announcements and updates are available at the end of the page.
For more updates and to stay in touch, like us on Facebook or follow us on our general Twitter feed. And to ensure that you don't miss any time-sensitive announcements, subscribe to our LNF Alerts twitter feed!

A list of tool repairs and limited statuses is available here.

Process Chilled Water shutdown January 15-19 2018

The process chilled water (PCW) in the LNF and surrounding labs will be shut down from 6:00 am Monday 01/15/2018 to Thursday 01/18/2018. We expect to start bringing tools back up from Friday 01/19/2018 morning. Lab spaces affected by the shutdown are: EECS 1332, 1421, 1427, 1428, 1428A, 1436, 1437, 1440A-E, 1450, 1452, and 1456.

LNF equipment unavailable during this time are:

  • AE Furnace
  • AE Evaporator
  • Enerjet Evaporator
  • SJ-20 Evaporator
  • Cooke Evaporator
  • RTP 100
  • RTP 150
  • GCA AS200 AutoStep
  • EVG 510
  • EVG 521
  • Oxford ALD
  • Oxford ICP RIE
  • Plasmatherm 790
  • LAM 9400
  • CMP Strasbaugh 6EC (limited capability, new chiller will be offline)

Please plan your processing accordingly. If you have any questions, you may create a Helpdesk Ticket for the specific tool.

Announcements for December 2017 - supplement

Announcements for December 2017

Announcements for November 2017

Announcements for October 2017

Announcements for September 2017

Announcements for August 2017

Announcements for July 2017

Archived Announcements and Updates


Job Openings

LNF Users - Ph.D. Defenses