Announcements

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This page displays recent announcements and updates for the Lurie Nanofabrication Facility. Links to archived announcements and updates are available at the end of the page.
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A list of tool repairs and limited statuses is available here.

Announcements for April 2018

Seed Funding Opportunity: April 1 deadline

This new seed funding program is intended to enable new research activities in the LNF, or to support the development of new processes benefiting the LNF community. Awards are $5k for one year, renewable once, and funds will be available for any LNF charges during the year. Proposals can be submitted anytime throughout the year, and there will be three review cycles annually. We expect to award about 2 projects per cycle. Proposal submission is electronic and the program offers a quick review and decision process, with projects starting as soon as one month after proposal submission deadline.

Submit your proposal here: https://tinyurl.com/LNFseedfunding
Read more information about the seed funding program here: http://lnf-wiki.eecs.umich.edu/wiki/Seed_Funding

Announcements for March 2018

Announcements for February 2018

Announcements for January 2018

Process Chilled Water shutdown January 15-19 2018

The process chilled water (PCW) in the LNF and surrounding labs will be shut down from 6:00 am Monday 01/15/2018 to Thursday 01/18/2018. We expect to start bringing tools back up from Friday 01/19/2018 morning. Lab spaces affected by the shutdown are: EECS 1332, 1421, 1427, 1428, 1428A, 1436, 1437, 1440A-E, 1450, 1452, and 1456.

LNF equipment unavailable during this time are:

  • AE Furnace
  • AE Evaporator
  • Enerjet Evaporator
  • SJ-20 Evaporator
  • Cooke Evaporator
  • RTP 100
  • RTP 150
  • GCA AS200 AutoStep
  • EVG 510
  • EVG 521
  • Oxford ALD
  • Oxford ICP RIE
  • GSI PECVD
  • Plasmatherm 790
  • LAM 9400
  • CMP Strasbaugh 6EC (limited capability, new chiller will be offline)

Please plan your processing accordingly. If you have any questions, you may create a Helpdesk Ticket for the specific tool.



Archived Announcements and Updates

Other

Job Openings

LNF Users - Ph.D. Defenses