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Lurie Nanofabrication Facility

This wiki exists for the sharing of information regarding the Lurie Nanofabrication Facility (LNF) at the University of Michigan. The LNF is available, on a fee basis, for use by research groups from government, industry and universities. Equipment and processes are available for research on silicon integrated circuits, MEMS, III-V compound devices, organic devices and nanoimprint technology. We also encourage researchers from non-traditional disciplines to make use of our processes, such as metal and dielectric coatings, vacuum processes, fabrication of micro and nano components and metrology tools.

The mission of the LNF is to provide effective, efficient, safe, and socially responsible access to advanced nanofabrication equipment and expertise thereby promoting, enabling, and encouraging cutting-edge education, research and business development from materials and individual process steps to entire systems.


To learn more about the capabilities available at the LNF, visit the Capabilities section of the wiki. This includes information about the different technologies supported at the LNF, available equipment, processes and allowed materials.


Resources available to the LNF community are listed on the following page: User Resources. They include copies of LNF user training manual, memos related to financial matters, email lists to reach LNF staff, and different files (presentations, logos, archived seminars) relevant to LNF users.

For information about how to gain access to the LNF, please see the lnf.umich.edu website.


Announcements relevant to the LNF community are displayed and archived on the following page: Announcements. They include the LNF monthly update emails and other announcements.

Contributing to the wiki

Members of the LNF community are encouraged to contribute to the wiki. Instructions on how to contribute can be found on the LNF User:Main Page.