2017 HEPA Filter Changeout

This page has been created to consolidate updates, as the work progresses, of the HEPA filter changeout.

Status update as of 5/18/17 3pm

HEPA filter and LED change has been completed, certification is done. The lab is now back to normal operation!

Overview by tool

Processing done on	moves to	when?	Comments
Acid 72	Acid 23	week 1 & 3	Located in 1480C. Acid 23 does not have a hot plate
Acid 73	Acid 23	week 1 & 3	Located in 1480C. Acid 23 does not have a hot plate
Acid 83	Acid 23	week 1 & 3	Located in 1480C. Acid 23 does not have a hot plate
Solvent 83 & 84	Solvent 14 &22	week 1 & 3	Solvent 14 has some storage area. Solvent 14 has 2 ultrasounds tanks and PRS-2000
Gold Plating	Unavailable	week 1	Bench will be closed
Base 63	Acid 23	Week 1 (second half)	Mostly for III-V users
Microscopes & Workstations	1480C	Week 3 (second half)
CEE 100, 200, developer spinners	unavailable	Week 1 (second half)
XeF2	unavailable	week 1 & 3
Angstrom Engineering Furnace	unavailable	Week 1 & 3
Tempress Furnaces	unavailable	Week 1 & 3
Denton Sputtering	unavailable	Week 1 & 3
Evaporators and RTP tools	unavailable	Week 2
LAM 9400, Plasmatherm, Oxford ICP, Oxford ALD, GSI PECVD	unavailable	Week 2
Aligners, Bonders, Stepper, ACS, Image Reversal Oven	unavailable	Week 3
MBE rooms	Unavailable	Week 2 (second half)

See further details below http://lnf-wiki.eecs.umich.edu/wiki/2017_HEPA_Filter_Changeout#Wet_bench_plan_-_details.

Map

Schedule and Update

Week 1 (April 24 - April 28) *** work is complete ***

• Area 1 (1440A, 1440B)
• Area 2 (1440C)

Week 2 (May 1 - May 5) *** work is complete ***

• Area 2 (1440D)
• Area 3 (1440E)
• Area 4

Week 3 (May 8 - May 12) *** work is complete ***

• Area 5 (1450 submicron room)
• Area 6 (1440 S front of the lab): This is the main corridor to 1440 A, B, C, D and E so also affects access to these bays.

Week 4 (May 15 - May 19) *** work is complete ***

Filter Testing. The lab will be fully open.

Wet bench plan - details

In order to minimize the impact of the lighting and filter work on our users we have developed the following plan for the wet benches. Acid 23 and Solvent 22 will temporarily be available to everyone during the light/filter change event.

• Week 1

Area 1: Processing normally done a Acid Benches 72, 73, and 83 will move to Acid 23 in 1480C. Acid 23 does not have a hot plate. Processing normally done at Solvent Benches 83 and 84 will move to Solvent Benches 14 and 22. Solvent 22 has some storage area, Solvent 14 has 2 ultrasound tanks and a PRS-2000 crystallizing dish.

• Week 3

Area 6: We will lose access to 1440A and 1440B (Area 1) during this time. We will follow the same protocols as Area 1. We will work to maintain access to the solvent cabinet so people have access to private photoresists.