AZ 400K

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AZ 400K is a potassium borates and potassium hydroxide based developer used for developing positive resist. It is not CMOS compatible so after using this developer you cannot go into CMOS clean or Semi clean furnaces and tools.

• Used for 9260 resist
• KOH is not compatible with semi clean or clean tools

Equipment

• Base Bench 63
• Base Bench 91

Storage Locations

• 1440C
• 1436

Safety

AZ 400K should be collected in Hazardous waste containers.

Processes

• Photoresist developing

Process SOPs

• There are currently no process SOPs defined for this chemical.

Technical Data Sheet

• TDS

Safety Data Sheet

• 400K

References

• Other links that are useful