Acid Bench 12

Acid Bench 12
Acid Bench 12
Equipment Details
Technology	Wet bench
Materials Restriction	Metals
Material Processed	Silicon and Glass wafers
Sample Size	4" and 6"
Chemicals Used	Aluminum Etch Buffered HF (BHF) Hydrofluoric acid (HF) Chromium Etch Hydrochloric acid (HCl) Hydrogen peroxide (H2O2) Gold Etch Nanostrip Nitric acid (HNO3) Sulfuric acid (H2SO4)
Equipment Manual
Overview	System Overview
Operating Procedure	SOP
Supported Processes	Processes
Maintenance	[hhttps://docs.google.com/document/d/1iQtyMhljghduyUj0k97MS6v6LCBJHdnKcUoplTfFjMk/edit?usp=sharing Maintenance]

Acid Bench 12 is used for working with acids, mostly for etching metals, pattering and cleaning substrates that have had metals on them. It is considered a Metals class tool, so wafers with metal are allowed in the bench with some restrictions. It is intended for use with 4” and 6” Si and glass substrates only. Only the processes listed below are allowed in this bench.

Announcements

• Update this with announcements as necessary

System Overview

Chemicals Allowed

• Aluminum Etch
• Buffered HF (BHF)
• Hydrofluoric acid (HF)
• Chromium Etch
• Hydrochloric acid (HCl)
• Hydrogen peroxide (H₂O₂)
• Gold Etch
• Nanostrip
• Nitric acid (HNO₃)
• Sulfuric acid (H₂SO₄)

Hardware Details

This bench contains 2 heated static chemical baths, DI Quick dump rinse tank (QDR), timers, and 4 unheated static chemical baths.

Safety

Proper PPE for this bench are apron, face shield, trionic gloves and safety glasses

Warning:

You must use the buddy system for all chemical processing. No processing if you are alone in the lab. If the yellow warning lights are on it means that there are 2 or 1 people in the lab.

Working with chemicals can be very dangerous. Chemicals used at this bench are some of the most hazardous in the lab. To minimize the chance of accident, make sure you always:

• Wear personal protective equipment. Required PPE at this bench is an apron, face shield, and Trionic gloves.
• LNF Glove Policy
• Know the properties and hazards of chemicals you are working with. If you don’t know, find out by reading about them or asking staff.
• Plan the details of your process. Before you start working, plan what quantities of chemicals and sample carriers you will use. Plan how you will rinse your sample and what you will do with any waste generated. Make sure you know how the controllers work.
• Only process 4” and 6” wafers.
• Do not use this bench without proper training.

• Waste from this bench goes into the LNF’s acid waste neutralization system and then to city sewers.
  • No solvents can be used or disposed of here.
  • Solutions which contains toxic materials that cannot be removed by neutralization (such as gold and chromium etch) should not be aspirated or disposed of down the drain.

Substrate Requirements

• 4 and 6 inch wafers
• Glass and Silicon

Material Restrictions

The Acid Bench 12 is designated as a Metals class tool. Below is a list of approved materials for the tool. Approved means the material is allowed in the tool under normal circumstances. If a material is not listed, please create a helpdesk ticket or email info@lnf.umich.edu for any material requests or questions.

Approved materials

Supported Processes

LNF Standard Processes in this bench

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Standard Operating Procedure

See the standard operating procedure below:

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Checkout Procedure

1. Take the General Wet Bench Training, if you haven't already.
2. Read through this page and the Standard Operating Procedure above.
3. Practice with your mentor or another authorized user until you are comfortable with tool operation.
4. Fill out Process Information Form. You will need to fill this out for each bench you plan on using.
5. Complete the Acid Bench 12 quiz.
6. Open a helpdesk ticket and request a checkout.
7. A tool engineer will schedule a time for checkout.

Maintenance

• Bench is checked for issues twice a week during lab clean
• Nanostrip is changed by staff weekly on Thursdays at 9:30
• Chromium etch and gold etch are changed by staff every six weeks

User supported maintenance

Please only make the following changes if you have been trained and are comfortable doing this. If you have an issue that is not detailed or are not trained please create a helpdesk ticket.

Chemical Change

Nano-strip Tank Change

Broken DI Gun

• Go in the back service aisle and turn off the inlet water to the bench
• Contact staff via a Helpdesk ticket

Broken Nitrogen Gun

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