Acid Bench 12

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Acid Bench 12
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Acid Bench 12
Equipment Details
Technology Wet bench
Materials Restriction Metals
Material Processed Silicon and Glass wafers
Sample Size 4" and 6"
Chemicals Used
Equipment Manual
Overview System Overview
Operating Procedure SOP
Supported Processes Processes
Maintenance [hhttps://docs.google.com/document/d/1iQtyMhljghduyUj0k97MS6v6LCBJHdnKcUoplTfFjMk/edit?usp=sharing Maintenance]


Acid Bench 12 is used for working with acids, mostly for etching metals, pattering and cleaning substrates that have had metals on them. It is considered a Metals class tool, so wafers with metal are allowed in the bench with some restrictions. It is intended for use with 4” and 6” Si and glass substrates only. Only the processes listed below are allowed in this bench.

System Overview

Chemicals Allowed

Hardware Details

This bench contains 2 heated static chemical baths, DI Quick dump rinse tank (QDR), timers, and 4 unheated static chemical baths.

Safety

Proper PPE for this bench are apron, face shield, trionic gloves and safety glasses
Warning Warning: You must use the buddy system for all chemical processing. No processing if you are alone in the lab. If the yellow warning lights are on it means that there are 2 or 1 people in the lab.

Working with chemicals can be very dangerous. Chemicals used at this bench are some of the most hazardous in the lab. To minimize the chance of accident, make sure you always:

  • Wear personal protective equipment. Required PPE at this bench is an apron, face shield, and Trionic gloves.
  • LNF Glove Policy
  • Know the properties and hazards of chemicals you are working with. If you don’t know, find out by reading about them or asking staff.
  • Plan the details of your process. Before you start working, plan what quantities of chemicals and sample carriers you will use. Plan how you will rinse your sample and what you will do with any waste generated. Make sure you know how the controllers work.
  • Only process 4” and 6” wafers.
  • Do not use this bench without proper training.
  • Waste from this bench goes into the LNF’s acid waste neutralization system and then to city sewers.
    • No solvents can be used or disposed of here.
    • Solutions which contains toxic materials that cannot be removed by neutralization (such as gold and chromium etch) should not be aspirated or disposed of down the drain.

Substrate Requirements

  • 4 and 6 inch wafers
  • Glass and Silicon

Material Restrictions

The Acid Bench 12 is designated as a Metals class tool. Below is a list of approved materials for the tool. Approved means the material is allowed in the tool under normal circumstances. If a material is not listed, please create a helpdesk ticket or email info@lnf.umich.edu for any material requests or questions.


Supported Processes

LNF Standard Processes in this bench

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Standard Operating Procedure

See the standard operating procedure below:

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Checkout Procedure

  1. Take the General Wet Bench Training, if you haven't already.
  2. Read through this page and the Standard Operating Procedure above.
  3. Fill out Acid Bench Process Request Form. You will need to fill this out for each bench you plan on using.
  4. Practice with your mentor or another authorized user until you are comfortable with tool operation.
    1. If your mentor is not an authorized user or you do not know of an authorized user that can train you, proceed to the next step.
  5. Score 100% on this quiz: Acid Bench 12 Training Quiz.
  6. Open a helpdesk ticket and request a checkout.
  7. A tool engineer will schedule a time for checkout.

Maintenance

  • Nanostrip is changed by staff weekly on Mondays at 9:30
  • Chromium etch and gold etch are changed by staff every six weeks