Acid Bench 82

Acid Bench 82
Equipment Details
Technology	Wet bench
Materials Restriction	Metals
Sample Size	Piece parts
Chemicals Used	Acetic acid (C2H4O2) Aluminum Etch Buffered HF (BHF) Hydrofluoric acid (HF) Chromium Etch Hydrochloric acid (HCl) Hydrogen peroxide (H2O2) Gold Etch Nanostrip Nitric acid (HNO3) Phosphoric Acid (H3O4P) Sulfuric acid (H2SO4)
Equipment Manual
Overview	System Overview
Supported Processes	Supported Processes
Maintenance	Maintenance

Warning:

This piece of equipment has been retired. It has been removed from the clean room

Acid Bench 82 is a wet bench used for working with acids, mostly for etching and cleaning of samples that have had metals and/or polymers on them. It is considered a Metals class tool, so wafers with metal are allowed in the bench. It is intended for use with mixed materials and all substrate sizes up to 6 inches with the main focus being on piece parts.

Announcements

Warning:

This bench is being retired. Please do not make tickets for training/ checkout on this bench. All processing can be moved over to Acid Bench 73 and Acid Bench 80 once it is installed

• There will be no new checkouts on this bench
• All existing processes on this bench may be moved to acid bench 73
• This bench will be removed and replaced

Capabilities

This bench is for wet processing of with piece parts, 4, and 6 inch samples of mixed materials. This includes III-V and II-VI materials, samples with polymers, and irregularly shaped samples.

• Overflow rinse tank
• Bench top for beaker processing

System overview

Chemicals Allowed

• Acetic acid (C₂H₄O₂)
• Aluminum Etch
• Buffered HF (BHF)
• Hydrofluoric acid (HF)
• Chromium Etch
• Hydrochloric acid (HCl)
• Hydrogen peroxide (H₂O₂)
• Gold Etch
• Nanostrip
• Nitric acid (HNO₃)
• Phosphoric acid (H₃O₄P)
• Sulfuric acid (H₂SO₄)

Hardware details

• Overflow rinse tank
• Bench top for beaker processing

Safety

Proper PPE for this bench are apron, face shield, trionic gloves and safety glasses

Warning:

You must use the buddy system for all chemical processing. No processing if you are alone in the lab. If the yellow warning lights are on it means that there are 2 or 1 people in the lab.

Working with chemicals can be very dangerous. Chemicals used at this bench are some of the most hazardous in the lab. To minimize the chance of accident, make sure you always:

• Wear personal protective equipment. Required PPE at this bench is an apron, face shield, and Trionic gloves.
• LNF Glove Policy
• Know the properties and hazards of chemicals you are working with. If you don’t know, find out by reading about them or asking staff.
• Plan the details of your process. Before you start working, plan what quantities of chemicals and sample carriers you will use. Plan how you will rinse your sample and what you will do with any waste generated. Make sure you know how the controllers work.
• Do not use this bench without proper training.

• Waste from this bench goes into the LNF’s acid waste neutralization system and then to city sewers.
  • No solvents can be used or disposed of here.
  • Solutions which contains toxic materials that cannot be removed by neutralization (such as gold and chromium etch) should not be aspirated or disposed of down the drain.

Substrate Requirements

• Piece Part to 6 inch wafers
• Open to all approved substrates/materials
  • Some materials may require the use of private beakers

Material restrictions

The Acid Bench 82 is designated as a Metals class tool. Below is a list of approved materials for the tool. Approved means the material is allowed in the tool under normal circumstances. If a material is not listed, please create a helpdesk ticket or email info@lnf.umich.edu for any material requests or questions.

Approved materials

Supported processes

There are a variety of chemical processes that can be performed on this bench, including:

• Aluminum Etch
• Aqua regia
• BHF
• Chromium Etch
• Dilute HF
• Gold Etch
• Nanostrip
• Piranha Etch.

If you wish to perform any other processes on this bench, they must be approved by a tool engineer. Please create a helpdesk ticket for assistance.

Checkout procedure

1. Take the General Wet Bench Training, if you haven't already.
2. Read through this page and the Standard Operating Procedure above.
3. Practice with your mentor or another authorized user until you are comfortable with tool operation.
4. Open a helpdesk ticket and request a checkout. Please specify your process and size of your samples.
5. A tool engineer will schedule a time for checkout.
6. Complete the 1440 Acid Bench quiz.
7. If you pass the quiz the tool engineer will authorize you on the tool. If not you will be contacted to repeat.

Maintenance

There are no staff maintained processes or tanks at this bench. This bench is checked and cleaned twice a week during lab clean