Acid Bench 92

Acid Bench 92
Acid Bench 92
Equipment Details
Technology	Wet bench
Materials Restriction	Metals
Material Processed	metals allowed, all materials except corrosive and toxic materials
Chemicals Used	acids
Gases Used	na
Equipment Manual
Overview	System Overview
Operating Procedure	SOP
Supported Processes	Supported Processes
User Processes	User Processes
Maintenance	Maintenance

The Acid Bench 92 is a multi-process acid bench. It houses several plating processes as well as wafer cleaning processes like piranha, HF and PFC and etches like the HF-Nitric and multiple metal etches. There is no restriction on the materials allowed. There is a strict separation (segregation) in the glass ware to be used depending on the process and all the metal samples are first rinsed in the sink before doing the last clean in the QDR. The QDR is regularly cleaned with sulfuric and the aqua regia mixture in order to keep it ion-free. There is an spinner drier (SRD) associated with this bench for the last cleaning step.

Capabilities

This is a general acid processing wet bench, the LNF supported processes are listed in the next section. This bench has the hardware needed for the following plating and etching process:

• Cu plating
• Ni plating
• In plating
• Fe-Ni plating
• HF-Nitric anisotropic Si etch
• HF etch
• Piranha Clean
• After CMP First step cleaning

System overview

Chemicals Allowed

This is a general use bench for acid based processes.LNF rovides the chemicals listed below

• Buffered HF (BHF)
• Phosphoric acid
• Nanostrip
• Hydrofluoric acid (HF)
• Sulfuric acid (H₂SO₄)
• Hydrogen peroxide (H₂O₂)
• Hydrochloric acid (HCl)
• Nitric acid (HNO₃₎
• Acetic acid (CH₃)COOH

Safety

Working with chemicals can be very dangerous. Chemicals used at this bench are some of the most hazardous in the lab. To minimize the chance of accident, make sure you always: Know the properties and hazards of chemicals you are working with. If you don’t know, find out by reading about them or asking staff. Plan the details of your process. Before you start working, plan what quantities of chemicals and sample carriers you will use. Plan how you will rinse your sample and what you will do with any waste generated. Make sure you know how the controllers work. Can process pieces, 4” and 6” wafers. Do not use this bench without proper training. Waste from this bench goes into the LNF's acid waste neutralization system and then to the city sewers. No solvents can be used or disposed of in this bench. Wear the recommended PPE.

Proper PPE for this bench are aprons, face shield, trionic gloves and safety glasses

Warning:

You must use the buddy system for all chemical processing. No processing if you are alone in the lab. If the yellow warning lights are on it means that there are 2 or 1 people in the lab.

Hardware details

• Bench top work: plating.
• Several plating bath, includes sample holder, filters, stirrer, counter electrode and counter electrode holder
• Plating pump for electrolyte recirculation
• Hot plate with temperature control
• Quartz heated tank for ionic clean
• HF tank
• Quartz Piranha tank
• DI rinse tank
• Nitrogen and DI gun
• Waste liquid aspirator

The acid waste goes to neutralization plant before is released into city sewage.

Additional Equipment

• Pulse plating Power supply
• Hot Plate
• Plating baths
• Diaphragm pump for plating

Substrate requirements

• Many sample sizes can be accommodated in this bench. Tanks and existing labware can accommodate up to 150mm wafers.
• Many types of materials are allowed in this bench.

Material restrictions

The Acid Bench 92 is designated as a Metals class tool. Below is a list of approved materials for the tool. Approved means the material is allowed in the tool under normal circumstances. If a material is not listed, please create a helpdesk ticket or email info@lnf.umich.edu for any material requests or questions.

Approved materials

The acid waste goes to neutralization plant before is released into city sewage.

Supported processes

This is a general acid processing wet bench, supported processes are listed below. The LNF supported processes are described in more detail on the Processes page.
Though, private, user requested processes are allowed.

• Metal etch
• Cu plating
• Ni plating
• In plating
• Fe-Ni plating
• HF-Nitric anisotropic Si etch
• PFC after CMP
• Piranha Etch
• HF etch

There are several processes for this tool supported by the LNF, which are described in more detail on the Processes page.

New processes:

1. Discuss with Staff
2. Write and SOP
3. Practice with staff the first time process is run
4. Correct SOP

In addition to these, this tool has a number of user-created recipes for etching a wide variety of materials. Some of these recipes are documented on Acid Bench 92 user processes. If you are curious if your material can be processed in this tool, please contact the tool engineers via the helpdesk ticket system.

Standard operating procedure

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Checkout procedure

1. Complete General Wet Bench Training
2. Read through this page and the general Standard Operating Procedure above.
3. Fill out Process request form
4. Create a Helpdesk Ticket requesting training/ Checkout

Maintenance

Besides the general cleaning during lab clean, this bench different baths and the D/R gets treated with 10% sulfuric regularly.