Aluminum

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Aluminum is a metal that is a silvery-white, soft, non-magnetic and ductile in the boron group.

Processing Equipment

Process technologies that can be used to deposit/pattern this material. If this is a substrate, refer to what tool/process restrictions there may be and possibly remove the following sub-sections.

Deposition Equipment

• Lab 18-2
• Enerjet Evaporator
• Angstrom Engineering Evovac Evaporator
• PVD 75 Proline

Etching Equipment

• Acid Bench 12 - maintained tank
• Acid Bench 73 - Beaker
• Acid Bench 80 - Beaker
• LAM 9400

Characterization Equipment

• Dektak XT

Applications

• Aluminum is a commonly deposited metal in the lab. It has a high reflectivity for optical devices.

Processes

Depositoin Processes

• E-beam evaporation

• Sputter deposition

Etch Processes

• Wet etching
  • Wet etching can be used to etch aluminum using Aluminum Etch at Acid Bench 12, Acid Bench 73, and Acid Bench 80.
• Reactive ion etching

Characterization Processes

• The profilometer can be used to measure the thickness of your deposition.

References

• Etch rates for micromachining processing https://ieeexplore.ieee.org/abstract/document/546406
• Etch rates for micromachining processing-Part II https://ieeexplore.ieee.org/abstract/document/1257354