Angstrom Engineering Furnace

Angstrom Engineering Furnace
Equipment Details
Technology	Thermal processing
Materials Restriction	Metals
Material Processed	CNT, Graphene
Sample Size	pieces up to 4" wafers
Gases Used	N2, Ar, He, O2, H2, CH4, C2H2, C2H4
Equipment Manual
Overview	System Overview
Operating Procedure	SOP
Maintenance	Maintenance

The Angstrom Engineering Furnace is a high temperature furnace for annealing, carbon nanotube growth and graphene deposition.

Announcements

• Only LNF staff are allowed to change the tube assembly configuration. The default configuration will be the the 2” standard annealing tube assembly, since this currently captures >85% of the current user needs. Please submit your request via the Helpdesk ticket system for a different assembly be to be installed at least one week in advance of when you plan to need the tool. The requested assembly will be scheduled to be installed on a Monday, then staff will change it back to the 2" standard annealing tube assembly on Wednesday morning.

Capabilities

• Annealing
  • Up to 1100°C - 2" assembly
  • Up to 950°C - 6" assembly
• Carbon nanotube growth
• Graphene deposition

System overview

Hardware details

• Gases
  • Nitrogen (N₂) - 10,000 sccm
  • Argon (Ar) - 1000 sccm
  • Helium (He) - 1000 sccm
  • Oxygen (O₂) - 1000 sccm
  • Hydrogen (H₂) - 50 sccm
  • Methane (CH₄) - 20 sccm
  • Acetylene (C₂H₂) - 1000 sccm
  • Ethylene (C₂H₄) - 1000 sccm
  • Hydrogen (H₂) - 1000 sccm
  • Methane (CH₄) - 1000 sccm
• Pressure
  • Gauge 1: 1-760 Torr
  • Gauge 2: 0-1 Torr
• Lamp heated assemblies
  • Up to 1100°C - 2" assembly
  • Up to 950°C - 6" assembly
  • Up to 100°C/min ramp rate
• Multiple assemblies
  • 2" annealing assembly (Default configuration installed)
  • 2" CNT assembly
  • 2" graphene assembly
  • 6" annealing assembly

Substrate requirements

• 2" assemblies can accommodate small pieces only
• 6" assembly can accommodate pieces up to 150mm (6") wafers

Material restrictions

The Angstrom Engineering Furnace is designated as a Metals class tool. Below is a list of approved materials for the tool. Approved means the material is allowed in the tool under normal circumstances. If a material is not listed, please create a helpdesk ticket or email info@lnf.umich.edu for any material requests or questions.

Approved materials

Supported Processes

Characterization Data

• Ramp down rate 2" assembly

Quick Reference Operating Procedure

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Checkout procedure

1. Create a Help desk Ticket requesting training.
2. LNF staff will schedule a time for initial training. After completing training the user can attempt a checkout session. It may be necessary for some users to participate in more than one training session, prior to attempting check out.
3. Schedule a checkout session with a tool engineer via the existing ticket. If this checkout is successful, the engineer will authorize you on the tool.