Archived Announcements 2018

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This page displays 2018 announcements and updates for the Lurie Nanofabrication Facility.

Announcements for December 2018 - supplement

Announcements for December 2018

Announcements for November 2018

Announcements for October 2018

Water damage September 2018

On Thursday 9/27/18 there was a failure in a water pipe connection in mechanical spaces on the 2nd floor of the EECS building and water leaked into the LNF (and some other laboratories) from the second floor.
See September 2018 Water Damage for more details and updates.

We are working to assess the equipment damage and bring tools back online as quickly as possible. In the meantime, we have made initial contacts with other facilities with similar capabilities. If you have urgent needs, please create a Helpdesk ticket and provide as much information about your process needs as possible so that we can try to find an alternative solution for you.

Announcements for September 2018

  • LNF News and Events
    • LNF Users Communication Meeting Sept 28
    • LNF Tech Talk Series - Metal-Semiconductors Contacts and their Applications to Devices Oct 19
    • One Day Leak-Checking/Vacuum Technology Workshop November 14, 2018
    • Seed Funding Opportunity for U-M researchers: October 1 Cycle
    • Job Openings (see dedicated Job Postings page on LNF wiki)
    • Announcements
  • Tool Updates
    • JEOL E-Beam Fast Writing Option
    • STS Pegasus (4 and 6) RF Generator Failure
    • STS Pegasus (4 and 6) Weekly Maintenance
    • STS Pegasus 6 Annual Maintenance
    • New Exposure Parameters for Heidelberg µPG501
  • Safety and Policies
    • Properly Storing Supplies
    • Label Color Changes
    • Replacement of Razor Blades
  • User of the Month: Bailey McCarthy Riley

Publication collection. Deadline 8/20/2018

Here is what we need. Please send this information by email to LNF-reports@umich.edu as soon as you can, and no later than Monday August 20th.

  1. List of all publications (conferences presentations, peer-reviewed journals, book chapters etc.) and patents or patent applications for the July 2017-June 2018 period, related to or making use of work performed in the LNF. In addition, if some of your publications are highlighted on a journal cover, please let us know. The proper format is: S. W. Yoon, S. Lee, N. Perkins, K. Najafi, "Analysis and wafer-level design of a high-order silicon vibration isolator for resonating MEMS devices," Journal of Micromechanics and Microengineering, vol. 21, no. 1 (2011). Please include the full citation, including title and date.
  2. If you have any project highlight or key accomplishments of one of projects during this past year, please also let us know using the attached powerpoint template. In the future, we will also be reaching out to community members working in specific research areas as we highlight different topics.

Thanks!

Announcements for August 2018

Announcements for July 2018

Announcements for June 2018

Seed Funding Opportunity: June 1 deadline

This new seed funding program is intended to enable new research activities in the LNF, or to support the development of new processes benefiting the LNF community. Awards are $5k for one year, renewable once, and funds will be available for any LNF charges during the year. Proposals can be submitted anytime throughout the year, and there will be three review cycles annually. We expect to award about 2 projects per cycle. Proposal submission is electronic and the program offers a quick review and decision process, with projects starting as soon as one month after proposal submission deadline.

Submit your proposal here: https://tinyurl.com/LNFseedfunding
Read more information about the seed funding program here: http://lnf-wiki.eecs.umich.edu/wiki/Seed_Funding

Announcements for May 2018

  • LNF News and Events
    • LNF Picture Contest 2018
    • LNF-OSUM Barbecue
    • Board Game Night
    • Recipe Swap
    • Slides from the LNF User Communications Meeting
    • New Team Member in LNF User Services Group
    • Store Hours Change
    • Farewell and Happy Retirement to Tom Latowski
    • Seed Funding Opportunity: Cycle 2
    • LNF Fee Schedule
    • Visitor Parking NC26 Unavailable May 16-17
    • Job Openings (see dedicated Job Postings page on LNF wiki)
    • Announcements
  • Tool Updates
    • SSEC Wafer Cleaner
  • Facility Updates
    • Strobic Fan Installation and Cleanroom Shutdown
  • Safety and Policies
    • Razor Blades Survey
    • Razor Blades Discontinued at SEM Sample Preparation Station
    • Label Color Changes
    • No Food or Drinks in the CAD room
    • Process Change or New Materials
  • User of the Month: Da Li

Razor Blade use in the Cleanroom and ROBIN labs

Due to several razor blade related accidents, we are asking for the LNF user community to help us understand where razor blade are used and whether or not they can be replaced with tools that are less accident prone. Please take a moment to take the Razor Blade Survey

Announcements for April 2018

Seed Funding Opportunity: April 1 deadline

This new seed funding program is intended to enable new research activities in the LNF, or to support the development of new processes benefiting the LNF community. Awards are $5k for one year, renewable once, and funds will be available for any LNF charges during the year. Proposals can be submitted anytime throughout the year, and there will be three review cycles annually. We expect to award about 2 projects per cycle. Proposal submission is electronic and the program offers a quick review and decision process, with projects starting as soon as one month after proposal submission deadline.

Submit your proposal here: https://tinyurl.com/LNFseedfunding
Read more information about the seed funding program here: http://lnf-wiki.eecs.umich.edu/wiki/Seed_Funding

Announcements for March 2018

Announcements for February 2018

Announcements for January 2018

Process Chilled Water shutdown January 15-19 2018

The process chilled water (PCW) in the LNF and surrounding labs will be shut down from 6:00 am Monday 01/15/2018 to Thursday 01/18/2018. We expect to start bringing tools back up from Friday 01/19/2018 morning. Lab spaces affected by the shutdown are: EECS 1332, 1421, 1427, 1428, 1428A, 1436, 1437, 1440A-E, 1450, 1452, and 1456.

LNF equipment unavailable during this time are:

  • AE Furnace
  • AE Evaporator
  • Enerjet Evaporator
  • SJ-20 Evaporator
  • Cooke Evaporator
  • RTP 100
  • RTP 150
  • GCA AS200 AutoStep
  • EVG 510
  • EVG 521
  • Oxford ALD
  • Oxford ICP RIE
  • GSI PECVD
  • Plasmatherm 790
  • LAM 9400
  • CMP Strasbaugh 6EC (limited capability, new chiller will be offline)

Please plan your processing accordingly. If you have any questions, you may create a Helpdesk Ticket for the specific tool.