Archived Announcements 2018
This page displays 2018 announcements and updates for the Lurie Nanofabrication Facility.
Contents
- 1 Announcements for December 2018 - supplement
- 2 Announcements for December 2018
- 3 Announcements for November 2018
- 4 Announcements for October 2018
- 5 Water damage September 2018
- 6 Announcements for September 2018
- 7 Publication collection. Deadline 8/20/2018
- 8 Announcements for August 2018
- 9 Announcements for July 2018
- 10 Announcements for June 2018
- 11 Seed Funding Opportunity: June 1 deadline
- 12 Announcements for May 2018
- 13 Razor Blade use in the Cleanroom and ROBIN labs
- 14 Announcements for April 2018
- 15 Seed Funding Opportunity: April 1 deadline
- 16 Announcements for March 2018
- 17 Announcements for February 2018
- 18 Announcements for January 2018
- 19 Process Chilled Water shutdown January 15-19 2018
Announcements for December 2018 - supplement
- News and Events
- LNF Symposium Poster Contest winners
- Seasonal Break
- Safety Reminder
- LNF Store
- LNF Access
- Silane Shutdown on Wed. 12/26
- U-M Research Safety Culture Survey (U-M users only)
- Duo two-factor authentication
- Happy Holidays from the LNF Team!
Announcements for December 2018
- LNF News and Events
- LNF Users Symposium December 7th, 2018
- Job Openings (see dedicated Job Postings page on LNF wiki)
- Announcements
- Tool Updates
- RCA 81 Spin Rinse Dryer
- CEE Developers #1 and #2
- RCA 81 Spin Rinse Dryer
- Facility Updates
- Silane Shutdown During Seasonal Break
- Safety and Policies
- Safety Reminder and LNF Usage During Seasonal Break
- Hazardous Waste Labels
- User of the Month: Amin Sandoughsaz
Announcements for November 2018
- LNF News and Events
- LNF Users Symposium December 7th, 2018
- LNF Users Symposium Poster Contest
- LNF Tech Talk - Metal-Semiconductors Contacts and their Applications to Devices is on the LNF Wiki
- Job Openings (see dedicated Job Postings page on LNF wiki)
- Announcements
- Tool Updates
- CEE 200X & SPR 220 (7.0)
- CEE Developers #1 and #2
- User of the Month: Geetha Duddanahalli Siddanna
Announcements for October 2018
- LNF News and Events
- LNF Tech Talk Series - Metal-Semiconductors Contacts and their Applications to Devices Oct 19
- LNF User Communication Meeting Slides
- One Day Leak-Checking/Vacuum Technology Workshop Nov 14
- Job Openings (see dedicated Job Postings page on LNF wiki)
- Announcements
- Tool Updates
- New OEM Group Endeavor AlN Sputter system Update
- Ion Mill Timeline Update
- Polyimide at Solvent 94
- Facility Updates
- September 27th, 2018 Water Damage Update
- November 1st Cleanroom and ROBIN Closure
- Safety and Policies
- No fees for staff time during training
- User of the Month: Saurabh Acharya
Water damage September 2018
On Thursday 9/27/18 there was a failure in a water pipe connection in mechanical spaces on the 2nd floor of the EECS building and water leaked into the LNF (and some other laboratories) from the second floor.
See September 2018 Water Damage for more details and updates.
We are working to assess the equipment damage and bring tools back online as quickly as possible. In the meantime, we have made initial contacts with other facilities with similar capabilities. If you have urgent needs, please create a Helpdesk ticket and provide as much information about your process needs as possible so that we can try to find an alternative solution for you.
Announcements for September 2018
- LNF News and Events
- LNF Users Communication Meeting Sept 28
- LNF Tech Talk Series - Metal-Semiconductors Contacts and their Applications to Devices Oct 19
- One Day Leak-Checking/Vacuum Technology Workshop November 14, 2018
- Seed Funding Opportunity for U-M researchers: October 1 Cycle
- Job Openings (see dedicated Job Postings page on LNF wiki)
- Announcements
- Tool Updates
- JEOL E-Beam Fast Writing Option
- STS Pegasus (4 and 6) RF Generator Failure
- STS Pegasus (4 and 6) Weekly Maintenance
- STS Pegasus 6 Annual Maintenance
- New Exposure Parameters for Heidelberg µPG501
- Safety and Policies
- Properly Storing Supplies
- Label Color Changes
- Replacement of Razor Blades
- User of the Month: Bailey McCarthy Riley
Publication collection. Deadline 8/20/2018
Here is what we need. Please send this information by email to LNF-reports@umich.edu as soon as you can, and no later than Monday August 20th.
- List of all publications (conferences presentations, peer-reviewed journals, book chapters etc.) and patents or patent applications for the July 2017-June 2018 period, related to or making use of work performed in the LNF. In addition, if some of your publications are highlighted on a journal cover, please let us know. The proper format is: S. W. Yoon, S. Lee, N. Perkins, K. Najafi, "Analysis and wafer-level design of a high-order silicon vibration isolator for resonating MEMS devices," Journal of Micromechanics and Microengineering, vol. 21, no. 1 (2011). Please include the full citation, including title and date.
- If you have any project highlight or key accomplishments of one of projects during this past year, please also let us know using the attached powerpoint template. In the future, we will also be reaching out to community members working in specific research areas as we highlight different topics.
Thanks!
Announcements for August 2018
- LNF News and Events
- LNF Picture Contest Winners
- LNF Tech Talk Series - Metal-Semiconductors Contact and its Application to Devices
- New LNF Staff Member
- Publication Collection
- Job Openings (see dedicated Job Postings page on LNF wiki)
- Announcements
- Tool Updates
- Endeavor AlN sputter system update
- Veeco Fiji ALD
- JEOL e-beam FEG replacement
- Chucks for CEE 100CB Spinner, CEE 200X PR Spinner, & CEE Developer
- Spin Rinse Dryer Recipes
- LNF to provide users with Polyimide 2610 and 2611
- Safety and Policies
- ROBIN Lost and Found
- User of the Month: Youngbae Son
Announcements for July 2018
- LNF News and Events
- Direct Writing Tech Talk is on the LNF Wiki
- Publication collection
- Electrify Summer Camp for High School Students
- Tool Updates
- Fiji ALD
- Photolithography process
- Lindberg Ovens in 1440A
- Safety and Policies
- SEM loading and unloading procedure
- Reminder: bags and belts in cleanroom gowning area
- July 4th week - light staffing
- User of the Month: Jae Cho
Announcements for June 2018
- LNF News and Events
- LNF Tech Talk Series: Direct Writing
- 2018 LNF Picture Contest: June 15 Extended Deadline
- Job Openings (see dedicated Job Postings page on LNF wiki)
- Announcements
- Tool Updates
- PVD 75
- CMP
- In-line SEM bakeout
- Safety and Policies
- Dress code reminder
- You can help!
- July 4th week - light staffing
- User of the Month: Mao Ye
Seed Funding Opportunity: June 1 deadline
This new seed funding program is intended to enable new research activities in the LNF, or to support the development of new processes benefiting the LNF community. Awards are $5k for one year, renewable once, and funds will be available for any LNF charges during the year. Proposals can be submitted anytime throughout the year, and there will be three review cycles annually. We expect to award about 2 projects per cycle. Proposal submission is electronic and the program offers a quick review and decision process, with projects starting as soon as one month after proposal submission deadline.
Read more information about the seed funding program here: http://lnf-wiki.eecs.umich.edu/wiki/Seed_Funding
Announcements for May 2018
- LNF News and Events
- LNF Picture Contest 2018
- LNF-OSUM Barbecue
- Board Game Night
- Recipe Swap
- Slides from the LNF User Communications Meeting
- New Team Member in LNF User Services Group
- Store Hours Change
- Farewell and Happy Retirement to Tom Latowski
- Seed Funding Opportunity: Cycle 2
- LNF Fee Schedule
- Visitor Parking NC26 Unavailable May 16-17
- Job Openings (see dedicated Job Postings page on LNF wiki)
- Announcements
- Tool Updates
- SSEC Wafer Cleaner
- Facility Updates
- Strobic Fan Installation and Cleanroom Shutdown
- Safety and Policies
- Razor Blades Survey
- Razor Blades Discontinued at SEM Sample Preparation Station
- Label Color Changes
- No Food or Drinks in the CAD room
- Process Change or New Materials
- User of the Month: Da Li
Razor Blade use in the Cleanroom and ROBIN labs
Due to several razor blade related accidents, we are asking for the LNF user community to help us understand where razor blade are used and whether or not they can be replaced with tools that are less accident prone. Please take a moment to take the Razor Blade Survey
Announcements for April 2018
- LNF News and Events
- LNF User Communications Meeting
- LNF Picture Contest 2018
- Job Openings (see dedicated Job Postings page on LNF wiki)
- Announcements
- Tool Updates
- SEM annual maintenance
- Solvent Bench 22 in 1480A
- Reminder about CEE Developers in 1440C
- Facility Updates
- Chemical Pass-throughs
- Safety and Policies
- Razor Blades
- Signing out from the Online Scheduler
- Label Color Changes
- Use of Bench Gloves
- User of the Month: Mathew Boban
Seed Funding Opportunity: April 1 deadline
This new seed funding program is intended to enable new research activities in the LNF, or to support the development of new processes benefiting the LNF community. Awards are $5k for one year, renewable once, and funds will be available for any LNF charges during the year. Proposals can be submitted anytime throughout the year, and there will be three review cycles annually. We expect to award about 2 projects per cycle. Proposal submission is electronic and the program offers a quick review and decision process, with projects starting as soon as one month after proposal submission deadline.
Read more information about the seed funding program here: http://lnf-wiki.eecs.umich.edu/wiki/Seed_Funding
Announcements for March 2018
- LNF News and Events
- ALD Tech Talk is on the LNF Wiki
- LNF access and parking changes
- Seed funding opportunity
- Job Openings (see dedicated Job Postings page on LNF wiki)
- Upcoming Defenses
- Tool Updates
- LAM 9400
- Solvent 83
- ADT 7100 Dicing Saw
- SSEC
- LEXT
- Facility Updates
- Facility Shutdown, and Repair/Upgrade
- Safety and Policies
- New Materials
- New Processes or Process Change
- User of the Month: Paras Patel
Announcements for February 2018
- LNF News and Events
- Atomic Layer Deposition (ALD) Tech Talk
- Funding Opportunity: U-M SCIP
- Job Openings (see dedicated Job Postings page on LNF wiki)
- New Senior Users
- Tool Updates
- New ALD Tool
- New capability for the Flip Chip Bonder
- Safety and Policies
- LNF supplies
- Reminder about PPE (Personal Protective Equipment)
- User of the Month: Zhizheng (Victoria) Zhang
Announcements for January 2018
- LNF News and Events
- 2017 LNF Users Symposium
- LNF Users Symposium Feedback
- Process Chilled Water Shutdown Jan 15-19
- Job Openings (see dedicated Job Postings page on LNF wiki)
- Announcements
- Tool Updates
- Agilent FTIR
- JEOL e-beam
- Safety and Policies
- Label Color Changes
- User of the Month: Alex Benken
Process Chilled Water shutdown January 15-19 2018
The process chilled water (PCW) in the LNF and surrounding labs will be shut down from 6:00 am Monday 01/15/2018 to Thursday 01/18/2018. We expect to start bringing tools back up from Friday 01/19/2018 morning. Lab spaces affected by the shutdown are: EECS 1332, 1421, 1427, 1428, 1428A, 1436, 1437, 1440A-E, 1450, 1452, and 1456.
LNF equipment unavailable during this time are:
- AE Furnace
- AE Evaporator
- Enerjet Evaporator
- SJ-20 Evaporator
- Cooke Evaporator
- RTP 100
- RTP 150
- GCA AS200 AutoStep
- EVG 510
- EVG 521
- Oxford ALD
- Oxford ICP RIE
- GSI PECVD
- Plasmatherm 790
- LAM 9400
- CMP Strasbaugh 6EC (limited capability, new chiller will be offline)
Please plan your processing accordingly. If you have any questions, you may create a Helpdesk Ticket for the specific tool.