Archived Announcements 2024

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This page displays 2024 announcements and updates for the Lurie Nanofabrication Facility.

Announcements October 2024

  • LNF News and Events
    • AFM Tech Talk and User Communication Meeting Recording are Available on the LNF Wiki
    • 2024 LNF Photo Contest - Voting Now Open!
    • LNF Smart Start in October
    • EECS 423 beginning on October 28, 2024
    • Announcements
    • Job Openings
  • Tool Updates
    • Heidelberg DWL66+
    • Reflectometer KLA Filmetrics F54
    • YES Vacuum Oven
    • KLA/SPTS SynapsEtch System
    • Four Point Probe
    • SB-6e
  • IT Updates
    • Input Needed: Upgrade of Lab Management System (Online Services)
  • LNF User Committee
    • LNF User Committee Meeting
    • LNF User Committee Office Hours
    • LNF User Committee Board Game Night

2024-10-02 LNF File server down

  • 11:35AM File server unexpectedly shutdown.
  • 1:00PM File server is running normally.

Announcements September 2024

  • LNF News and Events
    • LNF Tech Talk: Atomic Force Microscopy (AFM) on October 9, 2024
    • User Communication Meeting on October 15, 2024
    • LNF Smart Start in October
    • EECS 423 beginning on October 28, 2024
    • Gowning Videos Available Online
    • Job Openings
  • Safety and Policies
    • Chemical Waste Bottle Labeling
    • Private Chemical and Name Tag Purge in September 2024
  • Tool Updates
    • Oxford ICP RIE
    • Reflectometer KLA Filmetrics F54
    • YES Vacuum Oven
    • KLA/SPTS SynapsEtch System
    • PVD 75 is operational
    • Four Point Probe
    • Nitrogen Glove Box
  • IT Updates
    • Kiosk updates
    • Input Needed: Upgrade of Lab Management System (Online Services)


8/26/2024 LNF Helpdesk storage upgrade

8:45AM Storage resize completed with no errors.
8:40AM Storage resize started. LNF Helpdesk and other services may be unavailable several minutes.

Announcements August 2024

  • LNF News and Events
    • 2024 LNF Photo Contest
    • M-SHOW in the LNF on 8/22/24
    • Labor Day Schedule Reminder
    • LNF User Survey from LNF User Committee
    • Defenses
    • Job Openings
  • Facility Updates
    • EECS Building Partial Roof Replacement
    • LED Lighting Upgrade project
  • Safety and Policies
    • New Protocol for Aspirating Acids At Wet Benches
    • Finishing Chemical Bottles Before Opening New Ones
    • Dress Code Reminder
  • Tool Updates
    • AE Evaporator
    • YES Plasma Stripper
    • Reflectometer KLA Filmetrics F54
    • Miller FPP5000 Four Point Probe
    • P5000 PECVD
    • PSC 122M Mask Cleaner
    • Timers in Acid Benches 73 & 80, E-Beam Solvent Bench 22
  • IT Updates
    • Input Needed: Upgrade of Lab Management System (Online Services)


Lab Limited Access 2024-08-05 through 2024-08-06

UPDATE 2024-08-08 06:30pm EDT: LNF Online Services has been restored. The LNF labs will reopen at 06:00 EDT on 2024-08-09.

  • If you had entered reservations for Friday 8/9 or beyond using the temporary scheduling form, please (re)create them using the Online Services scheduler.
  • If you had not entered a reservation using the temporary scheduling form but need to reserve tools for tomorrow or beyond, please first verify tool availability using this spreadsheet (there are separate tabs for the main technologies, with reservations for tomorrow and beyond highlighted) https://docs.google.com/spreadsheets/d/1Lpb09tUUNwtmFxBET1r-W1vqdD-6ct5gtb5zg4PXq8o/view

UPDATE 2024-08-07 08:30am EDT: LNF Online Services (including the scheduler, store, etc.) remains offline. We are working to bring things back online as quickly as possible. Use the following link to report lab and tool issues: LNF Issue Reporting

A planned shutdown of LNF servers is required to complete the migration to new hardware.

Lab users should plan their tool requirements for August 5-6 ahead of time, and make those reservations before August 5.
During this maintenance period, lab users can enter the labs and use reserved tools during standard hours. After-hours access will NOT be permitted. After-hours are 6PM - 6AM weekdays and all weekend.

If we are able to complete the migration earlier than expected, systems may be restored sooner.

  • Available:
    • Daytime lab access
      • Lab tools
    • CAD walkup and walkup PCs
    • LNF Files server
    • Clean room camera display
    • lnf.engin.umich.edu, including the Contact LNF form
  • Reduced:
    • LNF Wiki (read-only mode)
  • Unavailable:
    • Online Services
      • Scheduler
      • Label software
    • Lab kiosks
    • “Users in lab” displays

Use the following link to report lab and tool issues: LNF Issue Reporting

Unplanned Systems Outage

9:20AM 2024-07-19: LNF systems restored
Around 7:20PM EDT on 2024-07-18, Windows users with Crowdstrike started reporting that their computers were showing Blue Screen of Death (BSoD)--an indication that the computer had a system failure and could not recover on its own. This issue affected LNF servers, taking down Online Services, access control, LNF-Wiki, etc. Crowdstrike has pushed a fix for the issue; if your computer is suffering from this issue, a reboot (or full shutdown and restart) may resolve it.

Announcements July 2024

  • LNF News and Events
    • 2024 LNF Photo Contest
    • New Staff Member - Svetlana Kiriushechkina
    • Updates to LNF charge reduction and incentive programs (internal users)
    • Announcements
    • Defenses
    • Job Openings
  • Facility Updates
    • LED Lighting Upgrade project
    • EECS Building Partial Roof Replacement
  • Safety and Policies
    • Dress Code Reminder
    • Hair Ties Available in Gowning Room
    • Wipe Down Chemical Bottles Before Capping
    • Chemical Processing Alone in Laboratories
  • Tool Updates
    • KLA/SPTS Synapse
    • PSC 122M Mask Cleaner
    • MJB 45S
    • YES Plasma Stripper
    • Zygo NewView 5000
    • Reflectometer KLA Filmetrics F54
  • IT Updates
    • LNF Server Maintenance
    • Input Needed: Upgrade of Lab Management System (Online Services)

Lab Limited Access 2024-07-11 through 15

9:30AM Maintenance start. LNF services will be reduced

A planned shutdown of LNF servers is required to migrate to new hardware.

Lab users should plan their tool requirements for July 11 through 15 ahead of time, and make those reservations before July 11.
During this maintenance period, lab users can enter the labs and use reserved tools during standard hours. After-hours access will NOT be permitted. After-hours are 6PM - 6AM weekdays and all weekend.

If we are able to complete the migration earlier than expected, systems may be restored sooner.

  • Available:
    • Daytime lab access
      • Lab tools
    • CAD walkup and walkup PCs
    • LNF Files server
    • Clean room camera display
    • lnf.engin.umich.edu, including the Contact LNF form
  • Reduced:
    • LNF Wiki (read-only mode)
  • Unavailable:
    • Online Services
      • Scheduler
      • Label software
    • Lab kiosks
    • “Users in lab” displays

Use the following link to report lab and tool issues: LNF Issue Reporting

Announcements June 2024

  • LNF News and Events
    • 2024 LNF Community Day Recap
    • 2024 LNF Poster Contest Winners
    • 2024 LNF Golden Tweezers Winners
    • Nanocamp in the cleanroom June 17 - 20, 2024
    • New Staff Member - Hunter Campbell
    • Fourth of July Schedule Reminder
    • Announcements
    • Defenses
    • Job Openings
  • Facility Updates
    • Fluorescent Desk Light for Wafer/PR Inspection
    • LED Lighting Upgrade project
    • EECS Building Partial Roof Replacement
  • Tool Updates
    • Lab 18-1
    • Lab 18-2
    • EVG 510 & 520
    • GSI PECVD
    • Icon AFM Updated Protocols
  • IT Updates
    • Input Needed: Upgrade of Lab Management System (Online Services)

Electrical substation damage 5/20/2024

4pm: LNF labs are open.
3pm: Equipment is being brought back online as needed and the lab is reopening. Many tools will need more time, so please check the scheduler for updated tool status.
1:30pm: Electrical substations have been restarted and we are working on the LNF facility systems. We hope to re-open the lab later today.
noon: Because of the impact on equipment as well as facility systems (DI water, air recirculation etc), all the LNF lab spaces are closed for the rest of the day. We expect to be able to reopen the space tomorrow morning 5/21 at 8am, but many tools may need more time before being available for processing. Updated schedules will be posted in the scheduler. If you need to enter the LNF today to pick up samples or anything, please create a Helpdesk ticket so that staff can escort you inside.
11am: Two EECS high-voltage electrical substations failed, and power is off in part of the LNF. The lab is closed while we assess the situation. Further updates will be provided in the wiki/announcement page and through the online services banner.

Emergency maintenance on LNF scheduler server 05/16/2024

10AM: Emergency maintenance on scheduler server is complete. All systems functionning as normal.
9:35AM: Maintenance starting. Scheduler outages possible. Tools with active reservations have been enabled.

Announcements May 2024

  • LNF News and Events
    • LNF Community Day on May 16, 2024
    • 2024 LNF Poster Contest on May 16, 2024
    • New LNF staff member - Nick Vanderkolk
    • LNF Smart Start May 29 - June 5, 2024
    • Memorial Day Schedule Reminder
    • AVS Symposium at Wayne State University - June 5, 2024
    • Announcements
    • Defenses
    • Job Openings
  • Facility Updates
    • LED Lighting Upgrade project
    • Cleanroom Garments
    • Private Chemical and Name Tag Purge in May 2024
  • Tool Updates
    • Tempress Furnaces
    • SEM Preventive Maintenance
    • Bruker Dimension AFM
    • Dimatix MP-2831 Inkjet Printer
    • Lab 18-01
    • GSI PECVD
    • LOR 10A
  • IT Updates
    • Data Purge
    • Input Needed: Upgrade of Lab Management System (Online Services)

LNF Server Network Maintenance 2024-04-22

1:50PM Restart appears to have addressed the Interlock communication issue. Please be alert for any additional issues.
1:40PM Scheduler not connecting with Interlocks. Restarting servers.
1:10PM LNF servers are back in service. Use standard methods to contact LNF staff as needed.
12:45PM LNF servers are returning to service, but Scheduler returns errors. Repairs continue.
9:15AM LNF Servers are down, require extensive repair, no ETA. If you have an urgent need for using the LNF, please email staff at staff@lnf.umich.edu
8:50AM Planned outages continue
8:35AM Expect brief outages

Announcements April 2024

  • LNF News and Events
    • LNF Community Day on May 16, 2024
    • 2024 LNF Poster Contest
    • LNF Staffing Updates
    • LNF Server Maintenance
    • New Lab Kiosks
    • Announcements
    • Defenses
    • Job Openings
  • Facility Updates
    • LED Lighting Upgrade project
    • Private Chemical and Name Tag Purge in May 2024
  • Tool Updates
    • EVG 510 and 520
    • SU-8 2000 series discontinuing in early-2025
    • Dimension Icon AFM
    • Sentro Tech Furnace
    • Pegasus 6
    • E-beam Oven
  • IT Updates
    • Input Needed: Upgrade of Lab Management System (Online Services)

Access control server migration continuation 3/27/2024

Update as of 12:10PM: Scheduler is available. Please use Scheduler and reservations as normal.

Update as of 10:15AM: Scheduler now unavailable. Reserved tools have been manually activated. If any other tool is needed please create a general Helpdesk ticket.

Update as of 9:30AM: New server setup and database backup in progress. Current (old) server and scheduler access not affected yet.

Plan: Vendor maintenance on the access control system to continue on Wed 3/27/24, starting at 8am, and is expected to cause LNF Scheduler downtime. Here is the expected impact of the maintenance:

  • Card reader door access will continue to work as normal
  • Scheduler will be unavailable. If you need to process on 3/27, please make all desired reservations before 8am. LNF Staff will be available on 3/27 to manually activate reserved tools and address unexpected issues.
  • On-the-fly reservations will not function during this downtime.

Live updates will be posted here.

Announcements March 2024

  • LNF News and Events
    • LNF User Communication Meeting From 2/29/24 is Available Online
    • Access Control System Maintenance expected on 3/27/24 – Online Services Scheduler Interruptions
    • EECS 425 Class Sessions in the LNF
    • LNF Staffing Update
    • Save the Date! LNF Community Day 5/16/24
    • Announcements
    • Defenses
    • Job Openings
  • IT Updates
    • Input Needed: Upgrade of Lab Management System (Online Services)

Access control server migration 3/18/2024

Update as of 2024-03-19: Vendor to return on 2024-03-27 8AM

Update as of 3PM: Server maintenance is on hold pending additional vendor resources. Lab access and reservations are operating normally. We are scheduling follow-up vendor support to complete the maintenance.

Update as of 10AM: New server setup continues. Old server not affected yet.

Plan: Vendor maintenance on the access control system on Mon 3/18/24, starting at 8am, is expected to cause LNF Scheduler downtime. Here is the expected impact of the maintenance:

  • Card reader door access will continue to work as normal
  • Scheduler will be unavailable. If you need to process on 3/18, please make all desired reservations by 3/17. LNF Staff will be available on 3/18 to manually activate reserved tools.
  • On-the-fly reservations will not function during this downtime.

Live updates will be posted here.

EECS Chilled Water Shutdown Wed 2/28/2024

Update as of 9am: building chilled water has been restored. The lab temperature should start decreasing. Check scheduler for latest updates.

Update as of 7:30am: the lab temperature is increasing. Photoresists are being moved to the fridge and users should not perform lithography.

Plan: An EECS building chilled water system shutdown is scheduled on Wed 2/28/24, 6am-11am. The LNF Process Chilled Water system is not being shutdown, but we may see a rise in temperature that may affect LNF equipment. Please check the scheduler for detailed equipment status.

Announcements February 2024

  • LNF News and Events
    • LNF User Communication Meeting on 2/29/24
    • EECS 425 Class Sessions in the LNF
    • Access Control System Maintenance the week of March 4- Online Services Scheduler Interruptions
    • Defenses
    • Job Openings
  • Facility Updates
    • EECS Chilled Water Shutdown Wed 2/28/2024
    • LED Lighting Upgrade project
  • Tool Updates
    • Bonder EVG 510, 520 and Aligner 620
    • GCA AutoStep 200
    • Reflectometer KLA Filmetrics F54
    • Oxford ICP RIE
    • Nanoquest Ion Mill
  • IT Updates
    • Input Needed: Upgrade of Lab Management System (Online Services)

Announcements January 2024

  • LNF News and Events
    • Processing affected by AWN, water main, and electrical maintenance on 1/17/24 and 1/18/24
    • Fee schedule update
    • January 2024 purges
    • LNF Smart Start in the Clean Room on Friday Mornings
    • Announcements
    • Defenses
    • Job Openings
  • Safety
    • Near Miss - Crystals on Acid Bottles
  • Tool Updates
    • EVG520
    • EVG 620
    • GCA AutoStep 200
    • Oxford ICP RIE
    • YES Plasma Stripper
    • Nanoquest Ion Mill
  • IT Updates
    • Input Needed: Upgrade of Lab Management System (Online Services)
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