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Equipment Details
Technology Metrology
Materials Restriction Undefined
Sample Size 6", 4" wafer and pieces
Equipment Manual
Overview System Overview
Operating Procedure SOP
Maintenance Maintenance

The Bruker ICON AFM is an atomic force microscope (AFM) which offers diverse capabilities: Tapping mode, contact mode, magnetic mode, piezo mode, Kelvin Probe (KPFM), electrical or i-mapping, and Peak Force. These techniques allow to map the surface topography and electro-mechanical properties in the nano scale. TappingMode AFM is a Bruker-patented technique that maps topography by lightly tapping the surface with an oscillating probe tip. The cantilever’s oscillation amplitude changes with sample surface topography, and the topography image is obtained by monitoring these changes and closing the z feedback loop to minimize them.


As of June 1st, 2021 - User to User- training will be allowed in this instrument. The training rules at LNF indicate no user in training can operate any tool of instrument alone. Mentor must be present at all times when trainee is operating the instrument. Trainer is responsible for all damages caused during training.

Pease sign the Log-Book after using the AFM

New Probes in the Store: Replacement for TESPA-V2
LNF will discontinue carrying the TESPA-V2 tips. Instead we will carry NCHV-A tips. Geometrically and functionally these tips are similar. This change will be transparent for you, your data will not change. For more information visit: Comparison NCHV-A vs TESPA-V2

To our users: the LNF store carries the following AFM tips:

  • NCHV-A (formerly TESPA-V2) (commonly used for tapping)
  • NP-10 (commonly used for contact mode)
  • SCM-PIT (a contact modetip electrically conductive used for TUNA and Kelvin Probe measurements)
  • TESP-SS (a contact mode tip that has a very sharp and narrow shape, the tip is a few nm in diameter, recommended for precision topography or narrow features)
  • DDESP (diamond coated tapping tip).

For more information visit

Note, you can use any tip that work with this AFM, you do not have to use only the tips suggested above.

Rules - Warning

  • You must bring your own tips - several types of tips are available in the LNF store
  • Never use USB to copy files - must use the LNF network to store files
  • Instrument is password protected, do not turn off the computer. You will not be able to start it.
  • In order to protect the piezo elements we require that when you engage and start the scan you start with an area of 0.5 um and slowly go up. Following Bruker's recommendation.


Supported processes

There are several processes for this tool supported by the LNF, which are described in more detail on the Processes page.

  • Tapping

Standard operating procedure

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Checkout procedure

  1. Read through this page and the Standard Operating Procedure above.
  2. Create a Helpdesk Ticket requesting training.
  3. A tool engineer will schedule a time for initial training.
  4. Practices with your mentor or another authorized user are allowed to resume. See Announcement section for details and expectations.
  5. Schedule a checkout session with a tool engineer via the helpdesk ticket system. If this checkout is successful, the engineer will authorize you on the tool.


Process name