Bruker NanoMan AFM

Bruker NanoMan AFM
NanoMan Atomic Force Microscope
Equipment Details
Technology	Metrology
Materials Restriction	General
Material Processed	no restrictions
Mask Materials	na
Sample Size	maximum feature height 7 um
Chemicals Used	na
Gases Used	na
Equipment Manual
Overview	System Overview
Operating Procedure	SOP
Supported Processes	Supported Processes
User Processes	User Processes
Maintenance	Maintenance

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The Bruker NanoMan AFM is a...

Announcements

• This AFM tool has been decommissioned. Please see the wiki page of the current AFM tool.

Capabilities

• Instrument stage can house pieces and wafers 4" and 6"
• Can measure approximately from 1nm to 6 micron features high features
• Scan Area 70x70 micron
• Maximum sample height 1"
• Can program measurements in several spots
• Can do tapping (AC), contact, magnetic, electric, piezo, force and KPAFM

System overview

Hardware details

• Gases
• Pressure
• Chuck
• Chamber
• RF / Power Specs
• Chemicals

Sample requirements

• sample size: from 5 mm² to 150 mm²
• sample must be flat and clean
• Need mounting for crossections
• maximum sample height : 2.5 cm
• back of the sample must be flat and clean for vacuum chuck to hold
• can measure features as tall as 6 microns and as big as 50 microns
• analysis area 50x50 micron²

Material restrictions

The Bruker NanoMan AFM is designated as a General class tool. Below is a list of approved materials for the tool. Approved means the material is allowed in the tool under normal circumstances. If a material is not listed, please create a helpdesk ticket or email info@lnf.umich.edu for any material requests or questions.

Approved materials

Samples must be clean and flat. Sticky surfaces are not suitable for this technique.

Supported Modes

Tapping Mode

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KPFM

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TUNA

There are several processes for this tool supported by the LNF, which are described in more detail on the Processes page.

Standard operating procedure

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Checkout procedure

1. Read through this page and the Standard Operating Procedure above.
2. Complete the training request form here.
3. Create a Helpdesk Ticket requesting training.
4. A tool engineer will schedule a time for initial training.
5. Practice with your mentor or another authorized user until you are comfortable with tool operation.
6. Complete the SOP quiz here.
7. Schedule a checkout session with a tool engineer via the helpdesk ticket system. If this checkout is successful, the engineer will authorize you on the tool.