Bruker NanoMan AFM

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Bruker NanoMan AFM
NanoMan Atomic Force Microscope
Equipment Details
Technology Metrology
Materials Restriction General
Material Processed no restrictions
Mask Materials na
Sample Size maximum feature height 7 um
Chemicals Used na
Gases Used na
Equipment Manual
Overview System Overview
Operating Procedure SOP
Supported Processes Supported Processes
User Processes User Processes
Maintenance Maintenance

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The Bruker NanoMan AFM is a...



  • Instrument stage can house pieces and wafers 4" and 6"
  • Can measure approximately from 1nm to 6 micron features high features
  • Scan Area 70x70 micron
  • Maximum sample height 1"
  • Can program measurements in several spots
  • Can do tapping (AC), contact, magnetic, electric, piezo, force and KPAFM

System overview

Hardware details

  • Gases
  • Pressure
  • Chuck
  • Chamber
  • RF / Power Specs
  • Chemicals

Sample requirements

  • sample size: from 5 mm2 to 150 mm2
  • sample must be flat and clean
  • Need mounting for crossections
  • maximum sample height : 2.5 cm
  • back of the sample must be flat and clean for vacuum chuck to hold
  • can measure features as tall as 6 microns and as big as 50 microns
  • analysis area 50x50 micron2

Material restrictions

The Bruker NanoMan AFM is designated as a General class tool. Below is a list of approved materials for the tool. Approved means the material is allowed in the tool under normal circumstances. If a material is not listed, please create a helpdesk ticket or email for any material requests or questions.

Samples must be clean and flat. Sticky surfaces are not suitable for this technique.

Supported Modes

Tapping Mode

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Contact Mode


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There are several processes for this tool supported by the LNF, which are described in more detail on the Processes page.

Standard operating procedure

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Checkout procedure

  1. Read through this page and the Standard Operating Procedure above.
  2. Complete the training request form here.
  3. Create a Helpdesk Ticket requesting training.
  4. A tool engineer will schedule a time for initial training.
  5. Practice with your mentor or another authorized user until you are comfortable with tool operation.
  6. Complete the SOP quiz here.
  7. Schedule a checkout session with a tool engineer via the helpdesk ticket system. If this checkout is successful, the engineer will authorize you on the tool.


Process name