Bruker Quantax 200 Energy Dispersive X- ray Spectrometer EDS

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Bruker Quantax 200 Energy Dispersive X- ray Spectrometer EDS


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Equipment Details
Technology Process Technology
Materials Restriction Undefined
Equipment Manual
Overview System Overview
Operating Procedure SOP
Supported Processes Supported Processes
User Processes User Processes
Maintenance Maintenance

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The Bruker QUANTAX 200 Energy Dispersive X- ray Spectrometer (EDS) with XFlash®6 silicon drift detector (SDD) is a modular EDS system for qualitative and quantitative microanalysis. The system’s standard-less quantification software enables manual, automatic or interactive spectra evaluation and provides reliable results for specimens with polished or irregular surfaces, thin layers and particles. The SDD is what makes the XFlash detector extremely fast enabling the procressing of up to 1M signals per second which facilitates real time ColorScan, ultra fastt mapping and elemental mapping.


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  • Etch Rate
  • Resolution
  • Aspect Ratio
  • Thickness range

System overview

Hardware details

  • Gases
  • Pressure
  • Chuck
  • Chamber
  • RF / Power Specs
  • Chemicals

Substrate requirements

  • Wafer Size
  • Wafer type
  • Any mounting?
  • Wafer thickness

Material restrictions

The Bruker Quantax 200 Energy Dispersive X- ray Spectrometer EDS is designated as a Undefined class tool. Below is a list of approved materials for the tool. Approved means the material is allowed in the tool under normal circumstances. If a material is not listed, please create a helpdesk ticket or email for any material requests or questions.

Supported processes

There are several processes for this tool supported by the LNF, which are described in more detail on the Processes page.

In addition to these, this tool has a number of user-created recipes for etching a wide variety of materials. Some of these recipes are documented on Bruker Quantax 200 Energy Dispersive X- ray Spectrometer EDS user processes. If you are curious if your material can be processed in this tool, please contact the tool engineers via the helpdesk ticket system.

Standard operating procedure

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Checkout procedure

  1. Read through this page and the Standard Operating Procedure above.
  2. Complete the training request form here.
  3. Create a [
          1. Helpdesk Ticket] requesting training.
  4. A tool engineer will schedule a time for initial training.
  5. Practice with your mentor or another authorized user until you are comfortable with tool operation.
  6. Complete the SOP quiz here.
  7. Schedule a checkout session with a tool engineer via the helpdesk ticket system. If this checkout is successful, the engineer will authorize you on the tool.


Process name