Bruker Quantax 200 Energy Dispersive X- ray Spectrometer EDS
| Bruker Quantax 200 Energy Dispersive X- ray Spectrometer EDS | |
|---|---|
 | |
| Equipment Details | |
| Technology | Metrology |
| Materials Restriction | General |
| Equipment Manual | |
| Overview | System Overview |
| Operating Procedure | SOP |
| Supported Processes | Supported Processes |
| User Processes | User Processes |
| Maintenance | Maintenance |
 Warning: | This page has not been released yet. |
The Bruker QUANTAX 200 Energy Dispersive X-ray Spectrometer (EDS) with XFlash®6 silicon drift detector (SDD) is a modular EDS system for qualitative and quantitative microanalysis. The system’s standard-less quantification software enables manual, automatic or interactive spectra evaluation and provides reliable results for specimens with polished or irregular surfaces, thin layers and particles. The SDD is what makes the XFlash detector extremely fast enabling the procressing of up to 1M signals per second which facilitates real time ColorScan, ultra fast mapping and elemental mapping.
Contents
Announcements
Capabilities
- Whole image spectra
- Atomic weight percentage calculations
- Point scan spectra
- Line scan spectra
- Elemental mapping
System overview
Hardware details
The Bruker QUANTAX 200 EDS is installed on the Hitachi SU8000 In-line FE-SEM. It works best with the following conditions to generate sufficient signal for analysis:
- Accelerating voltage ≥ 15 keV
- Emission current = 20 µA
- Working distance = 15 mm
- Probe current = High
Substrate requirements
- Most solids are allowed
- The tool is able to take small pieces to up to 6” wafers
- Unbaked polymers/adhesives, liquids, oils and anything that will outgas under vacuum are prohibited
- Samples likely to decrepitate at low pressure should not be put in the vacuum system of the tool
- Powder samples are prohibited
- Pieces must be stuck onto the appropriate diameter stub using either double sided Cu tape or high conductivity Ag paste only (all other mounting methods are prohibited).
- Magnetic samples require special use of tool functions. This is a separate training for users. Please create a Helpdesk Ticket if you want to image magnetic samples. If unsure, ask a staff member if the sample is safe for the tool.
- Sample pieces must be small enough to fit on stubs. An appropriate size sample may be stuck onto the stub using double-sided Cu tape.
Material restrictions
The Bruker Quantax 200 Energy Dispersive X- ray Spectrometer EDS is designated as a General class tool. Below is a list of approved materials for the tool. Approved means the material is allowed in the tool under normal circumstances. If a material is not listed, please create a helpdesk ticket or email info@lnf.umich.edu for any material requests or questions.
Standard operating procedure
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Checkout Procedure
- If your mentor is authorized on the system, practice the tool with them. Otherwise make a helpdesk ticket to schedule an initial training.
- Schedule a time for a checkout:
- Find an available time for checkout here.
- Verify that both the SEM and EDS are available in the LNF Online Services at the time you are requesting.
- After confirmation that the event is scheduled in Calendly, invite the staff member assigned to your event to a Staff Support reservations at that time.
- Create a helpdesk ticket for final confirmation of your checkout appointment.
- Authorization will be provided pending demonstration of proper tool use in the presence of a tool engineer.
