CEE 200X photoresist spinner 1

CEE 200X photoresist spinner 1
Equipment Details
Technology	Lithography
Materials Restriction	General
Material Processed	SPR 220 (3.0) S1813 SPR 955 (0.9)
Sample Size	pieces up to 6" wafers
Equipment Manual
Overview	System Overview
Operating Procedure	SOP
Supported Processes	Supported Processes
Maintenance	Maintenance

The CEE 200X photoresist spinner 1 is a fully programmable, automatic dispense, photoresist spinner located in 1440C. This tool has multiple chucks for 4" and 6" wafers, as well as pieces up to 2". It has automatic photoresist dispensers, but can also accommodate manual dispensing.

Announcements

SPR 220 7.0 has been removed from this tool. For thick resist use AZ 12XT.

S1813 has been added to this tool. It supports recipes up to 4000RPM.

Capabilities

Equipped Photoresists: SPR 220 (3.0), S1813, SPR 955 (0.9)

SU-8 must be processed in the ROBIN lab

PMMA and other e-beam resists should be processed in Photoresist Bench 31

LOR should be processed in the CEE 100CB photoresist spinner

For all other materials, please contact staff to request approval

System overview

Hardware details

• Up to 6K rpm spin rates
• Hot plate up to 200°C
• Photoresist is dispensed automatically with an equipped photoresist or through an EFD tube.

Substrate requirements

• 1x1 cm pieces up to 6" wafers
• No substrate material requirements
• Available Chucks
  • 6" Chuck (Ø 3.75")
  • 4" Chuck (Ø 2.25")
  • Large Piece Chuck (Ø 0.75")
  • Small Piece Chuck (Ø 0.25" - chuck ; Ø 0.375" - O-ring)

Material restrictions

The CEE 200X photoresist spinner 1 is designated as a General class tool. Below is a list of approved materials for the tool. Approved means the material is allowed in the tool under normal circumstances. If a material is not listed, please create a helpdesk ticket or email info@lnf.umich.edu for any material requests or questions.

Approved materials

Supported processes

The CEE 200X has recipes in 1000 rpm increments from 1000 to 5000 rpm for each of the equipped photoresists as well as for manual dispensed photoresists. There are recipes for pieces larger than 15 mm, 100 mm wafers and 150 mm wafers. The primary difference between theses recipes is how much photoresist is dispensed.

Details for the available recipes can be found in the following tables. These include average thicknesses expected using the automatic dispense recipes as well as examples for bake times, exposure values, and develop times. These parameters may vary for individual processes.

SPR 220 (3.0)
Spin Speed	Thickness	Softbake	Stepper Exposure	Contact Aligner Exposure	Post Exposure Bake	Puddle Develop Time
1000 rpm	4.6 µm	115°C for 90 sec	0.35 sec	?	115°C for 90 sec	AZ 726 DP 70-70
2000 rpm	3.2 µm	115°C for 90 sec	0.33 sec	?	115°C for 90 sec	AZ 726 DP 60-60
3000 rpm	2.5 µm	115°C for 90 sec	0.32 sec	?	115°C for 90 sec	AZ 726 DP 40-40
4000 rpm	2.2 µm	115°C for 90 sec	0.25 sec	?	115°C for 90 sec	AZ 726 DP 60
5000 rpm	1.9 µm	115°C for 90 sec	0.25 sec	?	115°C for 90 sec	AZ 726 DP 60

SPR 220 (7.0)
Spin Speed	Thickness	Softbake	Stepper Exposure	Contact Aligner Exposure	Post Exposure Bake	Puddle Develop Time
1000 rpm	15 µm	115°C for 90 sec	?	?	115°C for 90 sec	?
2000 rpm	10 µm	115°C for 90 sec	?	?	115°C for 90 sec	?
3000 rpm	7.6 µm	115°C for 90 sec	?	?	115°C for 90 sec	?
4000 rpm	7.0 µm	115°C for 90 sec	?	?	115°C for 90 sec	?
5000 rpm	6.4 µm	115°C for 90 sec	?	?	115°C for 90 sec	?

SPR 955 (0.9)
Spin Speed	Thickness	Softbake	Stepper Exposure	Contact Aligner Exposure	Post Exposure Bake	Puddle Develop Time
1000 rpm	1.6 µm	100°C for 90 sec	?	?	110°C for 90 sec	?
2000 rpm	1.2 µm	100°C for 90 sec	?	?	110°C for 90 sec	?
3000 rpm	.97 µm	100°C for 90 sec	0.30 Sec	5.5 Sec	110°C for 90 sec	AZ 726 DP 25-25
4000 rpm	0.8 µm	100°C for 90 sec	?	?	110°C for 90 sec	?
5000 rpm	0.7 µm	100°C for 90 sec	?	?	110°C for 90 sec	?

Standard operating procedure

• Standard Operating Procedure
• Troubleshooting

Checkout procedure

1. Complete a Lithography training session. If you have already completed this for another tool, you do not need to complete it again.
2. Practice on the tool with your mentor.
3. Read through the User Manual above.
4. Accurately complete the checkout quiz. You may retake as necessary until all answers are correct.
5. Schedule a time for a checkout:
   1. Find an available time for checkout here.
   2. Verify that the tool is available in the LNF Online Services at the time you are requesting.
   3. After confirmation that the event is scheduled in Calendly, invite the staff member assigned to your event to a Staff Support reservation at that time.
6. Create a helpdesk ticket for final confirmation of your checkout appointment.
7. Authorization will be provided pending demonstration of proper tool use in the presence of a tool engineer.

Maintenance

Photoresist levels are checked several times a week and replaced when low. The bowls and chucks are cleaned each week during lab clean.

User authorized maintenance

In the event of a power bump, users may run the startup/shutdown procedure.