CL200 Megasonic Cleaner
| CL200 Megasonic Cleaner | |
|---|---|
 | |
| Equipment Details | |
| Technology | Wafer bonding |
| Materials Restriction | Metals |
| Equipment Manual | |
| Overview | System Overview |
| Operating Procedure | SOP |
| Supported Processes | Supported Processes |
| User Processes | User Processes |
| Maintenance | Maintenance |
The CL200 Megasonic Cleaner is a substrate cleaner that can process 100 mm or 150 mm wafers. It uses either DI with a megasonic action to clean the wafers. The tool then dries the wafers via spinning with IR heating. Wafers should be cleaned in this tool before going into a bonder such as the EVG 520IS or SB-6E Bonder to reduce particulate.
Contents
Capabilities
- Remove particulate from wafers
System Overview
Hardware Details
- 3000 RPM drive
- IR heating to dry off wafers
- Vibratory motor to align wafers
Substrate Requirements
- Primarily 100 mm
- Can be converted to 150 mm
Material Restrictions
The CL200 Megasonic Cleaner is designated as a Metals class tool. Below is a list of approved materials for the tool. Approved means the material is allowed in the tool under normal circumstances. If a material is not listed, please create a helpdesk ticket or email info@lnf.umich.edu for any material requests or questions.
Supported Processes
The CL200 has standard recipes for a megasonic clean with DI. The main editable parameters are the number of scans, number of cycles, and the spin speed.
| Recipe | DI | JTB-100 | Comments |
|---|---|---|---|
| 4in Clean Single Wafer | Yes | No | A general purpose clean for 100 mm wafers |
| 4in RCA Clean Single Wafer | Yes | Yes | A general purpose JTB-100 clean for 100 mm wafers |
| 6in Clean Single Wafer | Yes | No | A general purpose clean for 150 mm wafers |
| 6in RCA Clean Single Wafer | Yes | Yes | A general purpose JTB-100 clean for 150 mm wafers |
Standard Operating Procedure
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Checkout Procedure
- Read through this page and the Standard Operating Procedure above.
- Practice with your mentor or another authorized user until you are comfortable with tool operation. If your mentor is not an authorized user or you do not know of an authorized user that can train you, proceed to the next step.
- Create a Helpdesk Ticket requesting training.
- A tool engineer will schedule a time for initial training.
- Schedule a checkout session with a tool engineer via the helpdesk ticket system. If this checkout is successful, the engineer will authorize you on the tool.
Maintenance
Once a month the chamber is inspected and cleaned.
