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The main article for this category is Reactive ion etching
This category has the following 3 subcategories, out of 3 total.
- ► DRIE (2 C)
- ► RIE equipment (1 C, 8 P)
- ► RIE processes (1 C, 40 P)
Pages in category "RIE"
The following 25 pages are in this category, out of 25 total.
- LNF User:LAM 9400 User Processes/Cr Etch
- LNF User:LAM 9400 User Processes/tsenguun polysi
- LNF User:LAM 9400 User Processes/Vik GaN BCl3 Cl2
- LNF User:LAM 9400 User Processes/XDev Cr
- LNF User:LAM 9400 User Processes/XDev GaN 1
- LNF User:LAM 9400 User Processes/XDev sapphire 3
- LAM 9400/Processes/LNF Al2O3
- LAM 9400/Processes/LNF Aluminum
- LAM 9400/Processes/LNF HfO2
- LAM 9400/Processes/LNF Poly
- LAM 9400/Processes/LNF Ti thin
- LAM 9400/Processes/LNF TiN sel Al2O3
- LAM 9400/Processes/mnf nitride1
- LAM 9400/Processes/mnf oxide1
- LAM 9400/Processes/mnf oxynite2
- LAM 9400/Processes/POLY ETCH 2