Chromium

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Chromium is a steely-grey, lustrous, hard, and brittle transition metal.

Processing Equipment

Deposition Equipment

• Lab 18-2
• PVD 75 Proline
• Enerjet Evaporator
• Angstrom Engineering Evovac Evaporator

Etching Equipment

Wet Etching

• Acid Bench 12
• Mask Bench 13
• Acid Bench 73
• Acid Bench 82

RIE

• Oxford ICP RIE

Applications

Common uses of Chromium include:

• masks

Processes

Deposition

• E-beam evaporation

• Sputter deposition

Etching

Wet Etching

Wet etching is done using Transene Chromium Etch. Chromium Etch is a mixture of ceric ammonium nitrate, nitric acid, and water.

References

• Citations/references for this material