EDP Bench 93

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EDP Bench 93
Equipment Details
Technology Wet bench
Materials Restriction Metals
Material Processed Si
Sample Size 4" wafers and smaller pieces
Chemicals Used
Equipment Manual
Overview System Overview
Operating Procedure EDP Bench 93 SOP
Supported Processes EDP Process SOP
User Processes User Processes
Maintenance Maintenance

The EDP Bench 93 is mostly dedicated wet bench for ethylenediamine pyrocatechol (EDP) etching. EDP is an anisotropic Si wet etch which is selective to heavily boron-doped silicon. It will etch lightly or moderately doped Si, but has much lower etch rate for heavily B-doped Si; this feature makes it useful as an etch stop and for releasing MEMS devices. EKC 265 post etch removal of the C-F wall residue from the Bosch etch process also takes place in this bench.


EKC 265 PlasmaSolv process is now allowed in this bench. Wafers (6" and 4") as well as pieces can be processed in this bench. At this point this is not an LNF supported process, it is up to each user to characterize their process. LNF does not stock EKC 265, it can be bought by users.


  • Etch Rate @ 110°C ~ 80 µm/hr

System overview

Chemicals Used

Hardware details

This bench contains a hot plate for heating EDP, a sink, a DI rinse tank and a heated large bath for EKC processing

Substrate requirements

  • 4" Si wafers and smaller pieces
  • 6" in the EKC 265 tank

Material restrictions

The EDP Bench 93 is designated as a Metals class tool. Below is a list of approved materials for the tool. Approved means the material is allowed in the tool under normal circumstances. If a material is not listed, please create a helpdesk ticket or email info@lnf.umich.edu for any material requests or questions.

Supported processes

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EDP is the only process supported by the LNF in this bench. However, a number of user-created recipes have been approved for this bench . Some of these recipes are documented on EDP Bench 93 user processes.

If you have questions as to whether your material can be processed in this tool, please contact the tool engineers via the Helpdesk ticket system.

Standard operating procedure

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Checkout procedure

  1. Read through this page and the Standard Operating Procedure above.
  2. Create a Helpdesk Ticket requesting training.
  3. A tool engineer will schedule a time for initial training.
  4. Practice with your mentor or another authorized user until you are comfortable with tool operation.
  5. Schedule a checkout session with a tool engineer via the Helpdesk ticket system. If this checkout is successful, the engineer will authorize you on the tool.


Due to the toxicity and volatility of EDP, the EDP bench and labware require thorough, cleaning after each use. The EDP bench and labware storage cabinets are wiped down with isopropanol during lab clean to to minimize build-up of residue.