Everbeing BD-6 Probe Station

Everbeing BD-6 Probe Station
Equipment Details
Technology	Metrology
Materials Restriction	General
Sample Size	pieces up to 6" wafers
Equipment Manual
Overview	System Overview
Operating Procedure	SOP
Supported Processes	Supported Processes
User Processes	User Processes
Maintenance	Maintenance

The Everbeing BD-6 Probe Station is a system that allows for electrical testing of structures using high precision micro manipulators to bring probes into contact with structures or probe pads on your sample. There is a digital multimeter for use at the tool to measure resistance between the probes that are in contact with your sample.

Announcements

• Update this with announcements as necessary

System overview

Substrate requirements

• The vacuum stage is capable of holding small pieces, 4", and 6" wafers.

Material restrictions

The Everbeing BD-6 Probe Station is designated as a General class tool. Below is a list of approved materials for the tool. Approved means the material is allowed in the tool under normal circumstances. If a material is not listed, please create a helpdesk ticket or email info@lnf.umich.edu for any material requests or questions.

Approved materials

There are no material restrictions for this tool.

Standard operating procedure

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Checkout procedure

1. Read through this page and the Standard Operating Procedure above.
2. Create a Helpdesk Ticket requesting training.
3. A tool engineer will arrange a time with you to meet for training. Checkout to receive authorization to use the tool independently may require more than one training session.