Extension Tests

This is a page to test extensions in development.

Extension Tests
LAM 9400 SE
Equipment Details
Technology	test
Materials Restriction	Semi-Clean
Material Processed	Si, SiO2, Si3N4, Polymers, Reactive Metals
Mask Materials	PR, SiO2
Sample Size	150 mm
Gases Used	Ar, BCl3, C4F8, Cl2, He, HBr, O2, SF6
Equipment Manual
Overview	System Overview
Operating Procedure	SOP
Supported Processes	Supported Processes
User Processes	User Processes

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