Extension Tests

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This is a page to test extensions in development.

Extension Tests
LAM 9400 SE
Equipment Details
Technology test
Materials Restriction Semi-Clean
Material Processed

Si, SiO2, Si3N4,

Polymers, Reactive Metals
Mask Materials PR, SiO2
Sample Size 150 mm
Gases Used

Ar, BCl3, C4F8, Cl2,

He, HBr, O2, SF6
Equipment Manual
Overview System Overview
Operating Procedure SOP
Supported Processes Supported Processes
User Processes User Processes

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