Iridium

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Iridium (Ir) is a hard, brittle transition metal with the atomic number of 77. It is an extremely dense metal. Iridium is also characterized by being very resistant to corrosion. In appearance, it is silvery in color.

Equipment

Process technologies that can be used to deposit/pattern this material. If this is a substrate, refer to what tool/process restrictions there may be and possibly remove the following sub-sections.

Deposition Equipment

• Lab 18-2

Characterization Equipment

• Metrology/Characterization equipment available in the LNF for measuring physical, optical, and surface properties of this material.

Applications

• Discuss common uses/applications for this material. Why this materials is used in the LNF?

Processes

Deposition Processes

• Sputter deposition

Etching Processes

• Plasma etching
• Iridium is not attacked by acids, including aqua regia.

Characterization Processes

• List of techniques for metrology/characterization can be used with this material and relevant process information specific to this material associated with this equipment/type of process.

Technical Data

• Charts or specific LNF related data for this material.

References

• Citations/references for this material, review articles. If possible, examples of users publications which includes the material.