Lab 18-2 User Processes/Au 3 VP

From LNF Wiki

Jump to navigation Jump to search

About this Process
Process Details
Equipment	Lab 18-2
Technology	PVD
Gases Used	Ar

Au 3 VP is a Superuser recipe where parameters can be modified to change film qualities.

Contents

1 Parameters
2 Characterization
3 Limitations

Parameters

Parameter	Deposition
DC Power	150 W
Pressure	100 mTorr

Characterization

Deposition Rate

Uniformity

Film Stress

Limitations

Retrieved from "https://lnf-wiki.eecs.umich.edu/wiki/index.php?title=Lab_18-2_User_Processes/Au_3_VP&oldid=8034"