Molybdenum

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Molybdenum (Mo or Moly) is a gray metallic chemical element with the atomic number of 42. Molybdenum is hard and stable. Moly has the 6th highest melting point among elements at 2623C.

Equipment

Process technologies that can be used to deposit/pattern this material.

Deposition Equipment

• Angstrom Engineering Evovac Evaporator
• Lab 18-1

Etching Equipment

• RIE

Characterization Equipment

• Dektak XT

Applications

• Discuss common uses/applications for this material. Why this materials is used in the LNF?

Processes

Deposition Processes

• E-beam evaporation

• Sputter deposition

Etching Processes

• Plasma etching

Characterization Processes

• The Dektak can be used to measure the thickness of a Molybdenum layer

Technical Data

• Charts or specific LNF related data for this material.

References

• Citations/references for this material, review articles. If possible, examples of users publications which includes the material.