Olympus IR Microscope

Olympus IR Microscope
Equipment Details
Technology	Metrology
Materials Restriction	General
Sample Size	4", 6" or pieces
Equipment Manual
Overview	System Overview
Operating Procedure	SOP
Maintenance	Maintenance

The IR Microscope is an Olympus BX51 Microscope that is useful for examining wafers or samples with infrared (1100 or 1200 nm) wavelengths. This is particularly useful for examining samples (like silicon) which are opaque in the visible light spectrum (~390 nm to ~700 nm) but which have some level of transmission in the infrared spectrum so that non-destructive through-wafer inspection can be performed. This microscope can be used in both the reflective mode using either the 1100 nm or 1200 nm filters or in the transmissive mode using your sample as the filter. For best results samples need to be double sided polished to reduce light scattering.

Announcements

• The tool is operating normally.

Capabilities

• Optical and infrared inspection of samples.
• Two Infrared light sources, reflective or transmissive.
• Reflective mode using with 1100 nm or 1200 nm.
• Transmissive mode using your your sample as light filter.

System overview

Hardware details

• 100 Watt halogen lamp
• Infinity Corrected Optical System
• 1100 nm band pass filter for IR (U-BP1100IR)
• 1200 nm band pass filter for IR (U-BP1200IR)
• Reflected polarizer slider for IR (U-POIR)
• Rotatable analyzer slider for IR (U-AN360IR)
• XM10IR Olympus Camera|https://www.olympus-ims.com/en/microscope/xm10ir/%7C

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  Power and Illumination Control

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  Light Control

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  Filters

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  Infrared Filters and Sliders

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  Objectives

Substrate requirements

• 4", 6", samples

Material restrictions

The Olympus IR Microscope is designated as a General class tool. Below is a list of approved materials for the tool. Approved means the material is allowed in the tool under normal circumstances. If a material is not listed, please create a helpdesk ticket or email info@lnf.umich.edu for any material requests or questions.

Approved materials

Supported Processes

• This tool does not have specific supported processes. See the SOP on how to use the tool.
• Create a Helpdesk Ticket if you need help imaging your sample, or have specific questions.

Standard operating procedure

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Checkout procedure

1. Read through this page and the Standard Operating Procedure above.
2. Schedule time for a training.
   1. Find an available time for staff training.
   2. Verify that the tool is available in the LNF Online Services at the time you are requesting.
   3. After confirmation that the event is scheduled in Calendly, invite the staff member assigned to your event to a Staff Support reservation at that time.
   4. Create a Helpdesk Ticket for final confirmation of your training appointment. Specify that it is for training in your helpdesk ticket.
3. Practice with your mentor or another authorized user until you are comfortable with tool operation.
4. Practice with your mentor or another authorized user as necessary until you are comfortable with tool operation.
5. Schedule a checkout session with a tool engineer via the helpdesk ticket system. If this checkout is successful, the engineer will authorize you on the tool.

Maintenance

The IR lamp is replaced as needed. If you find that the lamp is out or another problem with the microscope, create a Helpdesk Ticket