PMMA

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PMMA is a positive e-beam lithography resist from MicroChem. The LNF offers the 950 series in several viscosities.

Processes

PMMA processes vary depending on the design requirements. A few examples that work for many situations are listed below. For assistance characterizing a PMMA process, please create a helpdesk ticket.

Spin Curve

• There are currently no process SOPs defined for this chemical.

Equipment

PMMA spinning and baking should be performed in the E-Beam Spinner/Hot-Plate Bench. Exposure is done with the JEOL E-Beam. Development is done at the E-Beam Solvent Bench.

Process	Thickness (nm)	Notes
PMMA A4 4krpm	200	What's it good for?
row 2, cell 1	row 2, cell 2	row 2, cell 3

Technical Data Sheet

• PMMA Data Sheet

Safety Data Sheet

• There are currently no Safety Data Sheets (SDSes) for this chemical.