Parylene C

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Parylene C repeat unit.svg

Parylene C, a chlorinated poly(para-xylylene) polymer, is widely employed as a biocompatible, corrosion-resistant coating, as a packaging material, and as an optically transparent material. Parylene conformal coatings are ultra-thin, pinhole-free polymer coatings that provide a number of high-value surface treatment properties such as excellent moisture, chemical and dielectric barrier properties, thermal and UV stability, and dry-film lubricity. These properties make Parylene coatings the ideal choice for a number of applications throughout the medical device, electronics, transportation, defense and aerospace industries.

Processing Equipment

Deposition Equipment

Etching Equipment

Similar to other polymers, parylene can be etched isotropically with an O2 plasma.

Characterization Equipment


Common uses of Parylene C are

  • Coating on devices to make them more Bio Compatible
  • Soft structural material for Bio mems.


Deposition Processes

Etching Processes

  • RIE Etch
    • Parylene etches are O2 based and etch photoresits at a similar rates.
    • Hard masks of Aluminum or Silicon dioxide are often used.

Characterization Processes

Relevant Material Information

Contact angle of Water on Parylene
a)Schematic that shows the static contact angles b) Photograph of a water droplet on a Parylene C film.
As with other polymers, the hydrophilicity of the surface can be changed by exposing the sample to an oxygen plasma [1]

Below a list of useful information when considering the use of Parylene, taken from

  • Room temperature formation means the coatings are effectively stress-free
  • Parylene is chemically and biologically inert and stable and make excellent barrier material.
  • Parylene has excellent electrical properties: low dielectric constant and loss with good high-frequency properties; good dielectric strength; and high bulk and surface resistance.
  • Parylene has good thermal endurance: Parylene C performs in air without significant loss of physical properties for 10 years at 80°C and in the absence of oxygen to temperatures in excess of 200°C.
  • Parylene is optically transparent and can be used to coat optical elements.
  • FDA approved material
  • Parylene coating has excellent mechanical properties, including high tensile strength.
  • Parylene is stable over a very wide temperature range (-200 ‘C to +200 ‘C), allowing the chamber items coated in Parylene to be put in an autoclave
  • Parylene is unaffected by solvents

Technical data

For complete information on Parylene C physical properties see: Parylene C TDS

Parylene C thin film FTIR spectrum
Parylene C thin film FTIR Spectrum from reference above.