Parylene deposition

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Parylene deposition
Technology Details
Technology CVD
Equipment List of Parylene deposition equipment
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Parylene deposition is a method for depositing parylene, a thin, transparent polymer coating that is conformal, usually pinhole free, has high dielectric strength, high surface and volume resistivity, and resists moisture, acids, alkalis, petroleum products and solvents. Parylene is also “body safe” which means it can be used to protect medical devices and implantable electronics.


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Main article: SCS PDS 2035CR


Method of operation

A solid, granular raw material, called dimer, is heated under under vacuum and vaporized into a dimeric gas at 100-150C. The gas is then pyrolized to cleave the dimer to its monomeric form. In the room temperature, vacuum, deposition chamber, the monomer gas deposits on all surfaces as a thin, transparent polymer film. .



  • Implanted medical devices
  • Stents
  • Electrosurgical tools
  • Cochlear and ocular implants
  • Medical electronics


  • Printed circuit boards and assemblies
  • Sensors
  • LEDs
  • MEMS
  • Capacitors
  • Wafers


  • Electronics & Sensors
  • LEDs
  • Emissions Sensors


  • MEMS
  • Sensors
  • Circuit card assemblies


  • Hydrophobic coating
  • Barrier layers
  • Corrosion protection
  • Micro-structure reinforcement

Operating Procedures

Checkout procedure

  1. Create a Help desk Ticket requesting training.
  2. A process engineer will schedule a time for initial training. After completing training the user can attempt a checkout session. It may be necessary for some users to participate in more than one training session, prior to attempting check out.
  3. Schedule a checkout session with a tool engineer via the Help desk Ticket system. If this checkout is successful, the engineer will authorize you on the tool.


Maintenance on the tool is performed when the accumulated gram weight has reached 150 grams.