Reflectometer KLA Filmetrics F54

Reflectometer KLA Filmetrics F54
Equipment Details
Technology	Metrology
Materials Restriction	General
Sample Size	pieces and up to 8" wafers
Equipment Manual
Overview	System Overview
Supported Processes	Supported Processes
User Processes	User Processes
Maintenance	Maintenance

The Reflectometer KLA Filmetrics F54 measures the thickness of transparent and semi-transparent thin films and film stacks through non-contact spectroscopic reflectometry. The automated stage and autofocus system enables rapid generation of film thickness uniformity maps.

Capabilities

• Film thicknesses in the range of 200 Å to several µm
• Repeatability of ~1 Å 1-sigma

Maximum thickness is film dependent.

• Multiple layer stacks of thin films
• The Reflectometer KLA Filmetrics F54 measures film thickness using fixed “material file” optical constant values for n and k versus wavelength. If the optical properties of your film differ from the material file, your film thickness measurement may be inaccurate.

System overview

Hardware details

• Dual Halogen and Deuterium light source provide wavelength range 190 - 1700 nm.
• Measurement spot size is objective dependent
  • 10x objective → 25 µm in diameter
  • 20x objective → 12.5 µm in diameter
• Measurement time: typically < 1 sec/site
• Automated stage for rapid wafer map data collection

Substrate requirements

• Wafer Size - pieces up to 8" wafers
• Wafer type - silicon, gallium arsenide, indium phosphide, and other materials available in material file database (Note: thin films on transparent substrates cannot be measured unless backside of substrate is not polished (rough).)
• Maximum sample thickness - 1.25 mm (4" mounted on 6")

Material restrictions

The Reflectometer KLA Filmetrics F54 is designated as a General class tool. Below is a list of approved materials for the tool. Approved means the material is allowed in the tool under normal circumstances. If a material is not listed, please create a helpdesk ticket or email info@lnf.umich.edu for any material requests or questions.

Approved materials

As a General class tool, there are very few material restrictions for this tool other than:

• No materials that pose a health hazard from open handling
• No liquids or uncured spin on films
• No solvents under lenses.

Supported processes

• If the program, recipe, map, or material file you need are not on the tool, please submit a Helpdesk ticket to contact the tool owner for assistance.
• The Woollam M-2000 Ellipsometer can be used to measure optical constants for custom films.

Standard operating procedure

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Checkout procedure

1. Read through this page and the Standard Operating Procedure above.
2. Create a Helpdesk Ticket requesting training.
3. A tool engineer will coordinate a time for training.
4. Practice with your mentor or another authorized user until you are comfortable with tool operation.
5. Complete the SOP quiz here.
6. Schedule a checkout session with a tool engineer via the helpdesk ticket system. If this checkout is successful, the engineer will authorize you on the tool.-->

Maintenance

• Lamps are replaced as needed.