STS Pegasus 4/Processes/LNF Recipe 3

About this Process
Process Details
Equipment	STS Pegasus 4
Technology	DRIE
Material	Si
Mask Materials	PR, SiO2
Gases Used	SF6, C4F8, O2
Date Created	Jan 1, 2011
Authored By	Kevin Owen

LNF Recipe 3 is designed for deep and through wafer etching particularly on masks with a large exposed area (>20%). Undercut and scalloping is larger than LNF Recipe 1, but etch rates are higher (4-16 μm/min).

Procedure

Run LNF Recipe 3 for up to 20 minutes with the 1 minute automated clean recipe, longer etches should be run with the 3 minute automated clean recipe.

Recipe Parameters

Parameter	Dep	Etch
		Boost	Main
ICP Power	2000 W	4000 W
Bias Power	0 W	100 W	50 W
Bias Pulsing	N/A	40 Hz 80%
Pressure	25 mTorr	30 mTorr	100 mTorr
C4F8 Flow	200 sccm	0 sccm
SF6 Flow	0 sccm	600 sccm
O2 Flow	0 sccm	60 sccm
Time	4 s	2 s	6.5 s
Chuck Temperature	10°C

Capabilities

This process, as is true with all Bosch processes, varies depending on feature size and density, due to RIE lag. The below table contains typical results for 2 µm, 10 µm, and 100 µm trenches and the following sections expand on these results. It is strongly recommended that the process is tested with any new mask.

Parameter	2 µm Trench	10 µm Trench	100 µm Trench
Etch Rate	7 µm/min	10.5 µm/min	15.8 µm/min
Undercut	0.83 µm	1.13 µm	1.13 µm
Scallop height	1.8 µm	2.5 µm	2.9 µm
Scallop depth	0.5 µm	0.7 µm	0.8 µm
Sidewall angle	90.1°	90.1°	90.2°

Etch Rate

The etch rate will vary with the size of the trench being etched. Larger trenches tend to etch faster, this trend can be seen below.

Mask Selectivity

• Photoresist Etch Rate
  • SPR 220: 770 Å/min
• SiO₂ Etch Rate
  • Thermal oxide: 222 Å/min
  • HTO: 219 Å/min
  • LTO: 230 Å/min
  • PECVD: unknown
• Silicon nitride Etch Rate
  • LPCVD Nitride: 321 Å/min
  • LPCVD Low Stress Nitride: 223 Å/min

Sidewall Profile

Mask undercut, scalloping, and sidewall angle are shown below.

Trench

Running recipe 3 for 20 minutes with 3 µm of SPR 220 on a silicon wafer with our standard DRIE characterization mask can produce a profile like this.

• 

  Recipe 3 for 20 min, 2 µm Trench

• 

  Recipe 3 for 20 min, 10 µm Trench

• 

  Recipe 3 for 20 min, 100 µm Trench

Limitations

LNF Recipe 3 is known to work under a range of conditions. Outside of these conditions, etch performance is not guaranteed. Etch rates will vary depending on feature size, etch length, open area, etc. We strongly recommend testing the process prior to running device wafers.

Etch Length

• Generally 30 sec - 30 minutes is known to work well.
• Recipe 3 is tested for 10 min monthly to verify performance.
• Etches longer than 35 min are not well tested, since this is typically deeper than a standard thickness wafer.

Feature Size

• This recipe is designed for large (>10 μm) features.
• Smaller features often exhibit re-entrant (widening) sidewalls.
• The standard characterization pattern used to qualify Recipe 1 has open lines, trenches, and grating patterns from 1 μm - 100 μm.

Aspect ratio

• Aspect ratio limitations vary depending on feature size. For instance, 2 μm features have an aspect ratio limit of around 50:1. For larger features, aspect ratio is typically limited to the thickness of the wafer.

Open area

• This recipe will not produce grass up to 100% open area
• Large open areas (>50%) may require an SiO₂ mask, as excessive heating can cause photoresist to reticulate.
• Small (<20%) open area may cause an undesirable increase in etch rate or shift in sidewall profile due to excess Fluorine.

Multi-step etching

• Multi-step processing (i.e. running two or more etches with overlapping features) with the Bosch process is known to cause undesirable results. Please contact the tool engineers if you wish to run such a process so we can help reduce or eliminate issues.

Qualification

Every third Friday Recipe 3 is run for 10 minutes on a Si wafer with our standard DRIE characterization mask, with 3 µm of SPR 220. This is performed after the weekly clean, and a 100 µm trench is measured in 5 locations with the Zygo NewView 5000. This etch rate is reported in the chart below.