Solvent Bench 84
| Solvent Bench 84 | |
|---|---|
 Solvent Bench 84 | |
| Equipment Details | |
| Technology | Wet chemical processing |
| Materials Restriction | Metals |
| Material Processed | All types of wafers |
| Sample Size | from 1 cm pieces to 6" wafers |
| Chemicals Used | Remover PG, Acetone, IPA[IPA]], Methanol |
| Equipment Manual | |
| Overview | System Overview |
| Operating Procedure | SOP |
| User Processes | User Processes |
| Maintenance | Maintenance[LNF_User:Solvent Bench 84_User_Processes|User Processes]] |
The Solvent 84 Bench is for working with solvents, stripping resist, cleaning wafers, and lift-off. It is considered a non CMOS-clean bench, so wafers with metal are allowed in the bench. It is intended for use with 1 cm pieces up to 6 inch wafers and all materials.
Contents
System Overview
Chemicals Allowed
- IPA
- Acetone
- Remover PG
- Methanol
- Waferbond Remover Private stock
- PRS 2000 Private stock
- Xylenes Stored in 1440C Passthrough
Hardware Details
This bench contains 3 heated ultrasonic baths, DI Quick Dump Rinse tank (QDR), timers, and there is an aspirators on this bench that goes to solvent waste, a tank that goes to the acid waste neutralization system, and a bottle drying setup.
Safety
 Warning: | You must use the buddy system for all chemical processing. Do not process if you are alone in the lab. If the yellow warning lights are on it means that there are 2 or 1 people in the lab. |
Working with chemicals can be very dangerous. Many solvents are very carcinogenic so avoid contact and breathing the vapors. To minimize the chance of accident, make sure you always:
- Wear personal protective equipment. Required PPE at this bench are safety glasses and Trionic or Neoprene gloves.
- LNF Glove Policy
- Know the properties and hazards of chemicals you are working with. If you don’t know, find out by reading about them or asking staff.
- Plan the details of your process. Before you start working, plan what quantities of chemicals and sample carriers you will use. Plan how you will rinse your sample and what you will do with any waste generated. Make sure you know how the controllers work.
- Do not use this bench without proper training.
- There are two routes of disposal from this bench based upon material:
- Solvent aspirator: Only solvents can be disposed of using this aspirator. DO NOT aspirate water with this aspirator.
- Water waste tank: Only water can be disposed of down the drain. DO NOT pour solvents into this tank.
Substrate Requirements
All sizes and materials accomodated
Material Restrictions
The Solvent Bench 84 is designated as a Metals class tool. Below is a list of approved materials for the tool. Approved means the material is allowed in the tool under normal circumstances. If a material is not listed, please create a helpdesk ticket or email info@lnf.umich.edu for any material requests or questions.
Standard Operating Procedure
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Checkout Procedure
- Take the General Wet Bench Training, if you haven't already.
- Read through this page and the Standard Operating Procedure above.
- Fill out the Solvent Bench Process Request Form
- Practice with your mentor or another authorized user until you are comfortable with tool operation.
- If your mentor is not an authorized user or you do not know of an authorized user that can train you, proceed to the next step.
- Score 100% on this quiz: Cleanroom Solvent Bench quiz.
- Open a helpdesk ticket and request a checkout.
- A tool engineer will schedule a time for checkout.
- If you pass the quiz the tool engineer will authorize you on the tool.
Maintenance
The bench is checked during lab clean Mondays and Thursdays.
