Solvent Bench 94/Processes

This page lists the processes supported by the LNF for Solvent Bench 94.

Process List

• SU-8 Photolithography

  SU-8 is a negative, epoxy-based photoresist manufactured by Kayaku (formerly MicroChem). It is commonly used to make PDMS molds for microfluidics and other applications. Several different series are available, and in each series, SU-8 is available in a range of viscosities. The LNF provides several viscosities of the SU-8 2000 series (SU-8 2002, 2005, & 2010 are included in cost of using Solvent Bench 94; SU-8 2050 & 2100 are available for purchase from the LNF Store). Product datasheets are available here:

  • SU-8 2000.5 to 2015
  • SU-8 2025 to 2075
  • SU-8 2100 to 2150
• PDMS Molding

  [PDMS|Polydimethylsiloxane (PDMS)] is used to make microfluidics devices. The LNF offers kits of Sylgard 184 silicone elastomer made by Dow Corning for purchase from the LNF Store. This SOP describes the procedure for PDMS mixing and molding and coating a mold with release agent.

• Temporary Bonding SOP

  This SOP explains temporary bonding of a sample to a carrier wafer with beeswax for lapping or polishing.