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26 November 2024
→Doped Poly silicon
-255
→Poly silicon
+255
→Tempress S4T3 - Flat Poly 6"
+33
→Tempress S4T3 - P-type in Situ Doped Poly-Si 4"
-39
→Nitride
-22
→Tempress S2T3 - Nitride-HTO-OxyNitride 4"
-13
→Tempress S2T2 - Nitride-HTO 6"
no edit summary
-35
3 April 2020
16 March 2020
10 March 2020
25 February 2020
21 September 2017
29 June 2017
28 June 2017
→Applications
+3
→Parameters
+169
no edit summary
+30
no edit summary
+89
→Applications
-53
no edit summary
+375
8 March 2016
1 March 2016
25 February 2016
23 February 2016
no edit summary
-1
→Uniformity
+22
→Refractive Index
+20
→Refractive Index
+100
→Step Coverage
+7
→Film Stress
+1
→Figures of Merit
+236
→Applications
+54
→Method of operation
18 February 2016
→Applications
+117
→Applications
+579
→Applications
→Applications
+2
→Applications
+726
→Applications
+169
→Applications
+6
→Applications
+760
