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SB-6E Bonder

128 bytes removed, 1 year ago
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This tool is used to bond 4" wafers, (and in some circumstances be configured for 6" wafers). It is primarily used for [[Anodic bonding|anodic bonding]] and has superior anodic bond hardware when compared to our other bonders. Other types of bonds are allowed, but a helpdesk ticket should be created and the process discussed with one of the tool engineers. Anodic power supply polarity is reversible and the top electrode is capable of tack bonding in the center prior to full wafer bonding.
* None at this time
* Chamber vacuum below 5.0e-5 mbar easily achieved
* Tool force of 30 kN
* Max chuck temp of 550°C500°C
* Substrate stack thicknesses of 500 um to 5 mm possible. Thinner or thicker with tool engineer approval.
==System overview==
===Hardware details===
* Up to 550 500 °C chuck temp
* 30 kN tool Pressure
* 4" Chuck, 6" available by request
===Material restrictions===
{{note|The approved materials listed for the {{PAGENAME}} are restricted to those that can come into surface with the tooling. There are several exceptions that are allowed within the bond interface, depending on the type of bond used. Some of these can be found in the [[#supported processes]] section. For any other materials, please create a helpdesk ticket. }}
{{material restrictions}}
<!-- Describe the checkout procedure for the tool. For example: -->
# Read through this page and the Standard Operating Procedure above.
# Practice with your mentor or another authorized user until you are comfortable with tool operation.# Create a [{{#var:toolid}} Helpdesk Ticket] requesting training, and to review your process needs.# A tool engineer will schedule Create a time for training and[http://or checkoutssel-sched.eecs.# Schedule a checkout session with a tool engineer via the helpdesk ticket systemumich. If this checkout is successful, the engineer will authorize you on the tooledu/sselScheduler/ResourceContactaspx?tabindex=3&path=Maintenance== *Anodic baseline run done monthly on 4" wafers*chamber opened and cleaned Semi annually or as needed*chucks cleaned every time they're changed or as needed*clamp and spacer calibration checked bimonthly *pressure uniformity tested as needed or when requested===Process name===<!-- This is an example a chart published with etch data. You can just replace the url with your own. -->0:0:0:{{#widgetvar:Iframe|url=chart url|width=800|height=400|border=0toolid}}helpdesk ticket] requesting checkout.# Authorization will be provided pending demonstration of proper tool use in the presence of a tool engineer.
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