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LAM 9400/Processes/LNF Poly

49 bytes removed, 6 years ago
! Parameter
! Breakthrough
! Main Etch
|-
| Pressure
| 100 5 mTorr| 12 30 mTorr
|-
| TCP Power
| 300 W
| 500 600 W
|-
| Bias Power
| 50 100 W| 30 90 W
|-
| Cl<sub>2</sub> Flow
| 100 60 sccm
| 0 sccm
|-
| C<sub>4</sub>F<sub>8</sub> HBr Flow
| 0 sccm
| 100 sccm
|-
| He Flow
| 0 sccm
| 100 sccm
|-
| HBr
| 0 sccm
| 100 sccm
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