LNF_Poly is designed for etching
si and polysilicon in the LAM 9400. This recipe is currently under development and will replace poly_etch_2 as it does not have the same stability problems.
! Main Etch
| 5 mTorr
| 30 mTorr
Capabilities== ===Etch Rate=== ===Mask Selectivity===
=Sidewall Profile=== [[File:LAM_9400_LNF_Poly_2um_grating.jpg| 400px]]