Changes
Jump to navigation
Jump to search
← Older edit
Newer edit →
Sputter deposition
1 byte added
,
7 years ago
→Figures of Merit
==Figures of Merit==
The figures of merit are described in the generic [[Physical vapor deposition
|
PVD]] page
===Responses of Figures of Merit with Parameter changes===
====Deposition Rate, Stress, Resistivity and Step Coverage====
Mwoonk
LabUser, OnlineAccess, PhysicalAccess, Staff, StoreManager, StoreUser
909
edits
Navigation menu
Personal tools
English
Log In
Namespaces
Page
Discussion
Variants
Views
Read
View source
View history
More
Search
Navigation
lnf.umich.edu
Main page
Announcements
Capabilities
User Resources
Safety
Recent changes
Random page
Help
Tools
Special pages
Printable version