LNF_Poly is designed for etching
si and polysilicon in the LAM 9400. This recipe is currently under development and will replace poly_etch_2 as it does not have the same stability problems.
*Si - 2800 Å/min
*SPR 220 (3.0) - 275 Å/min
*SiO<sub>2</sub> - 150 Å/min
[[ File:LAM_9400_LNF_Poly_2um_grating.jpg| 400px]]