Jump to navigation Jump to search

Confocal laser optical profilometry

78 bytes added, 6 years ago
no edit summary
{{lead too short}} <!--
Fill out anything between the %percent signs% but don't include the percent signs.
--> <!--
==Method of operation==
*This technique is based on confocal microscope configuration using high numerical aperture objectives which have a very narrow depth of focus. Only the "in focus" reflected light passes through the confocal pinhole.
*A laser is scanned in X/Y across field of view on the sample surface.
*Confocal laser optical profilometry can be used for measuring surface roughness, sample topography, etched pattern step heights, and feature sizes.
*This technique and [[Scanning white light interferometry|scanning white light interferometry]] (SWLI) are particularly useful for characterizing the depth of high aspect ratio trench features which can not be measured using stylus profilometry. [Stylus profilometry] is only capable of a maximum aspect ratio of ~1 (or less depending on feature size) and a maximum step height of 150um due to physical dimensions and limitations of the stylus.
===Olympus OLS 4000 LEXT===
{{expand section}}
{{main|Olympus OLS 4000 LEXT}}
==Further reading==
* []
<!-- Do not add anything below this point besides categories. Which you are welcome to add more to, if appropriate -->
<!--[[Category:{{#var:acronym|{{PAGENAME}}}}| ]]-->
LabUser, OnlineAccess, PhysicalAccess, Staff, StoreManager, StoreUser, Bureaucrats, Interface administrators, Administrators, Widget editors


Navigation menu