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Deposition

204 bytes added, 6 years ago
| ~10nm
| More conformal metal and dielectric thin film deposition. Compounds that do not evaporate while keeping stoichiomettry
|-
| [[Parylene deposition| CVD Parylene Deposition]]
| Parylene
| ~30-50Å/sec
| 20ºC
| Good Sidewall coverage
| Good
| Very Low
| Good
| unknown
| Thick (0.8-75μm) encapsulation and insulation films
|-
| [[Plasma enhanced chemical vapor deposition| Plasma Enhanced CVD (PECVD)]]
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