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Deposition

5 bytes removed, 6 years ago
| Better quality oxide/nitride dep where substrate can handle higher temp
|-
| '''| Growth????? - INCLUDE IN LPCVD?'''''Italic text''| MainlyDielectricsMainly Dielectrics
| 0.1-100 Å/sec
| 600-1200ºC
| Very Good
| 1-10nm
| Best quality oxide/nitride dep where substrate can handle higher temp and slower dep rate|-'''''Bold text'''
| [[Electroplating|ECD/Plating]]
| Conductive Materials
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