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Deposition

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! style="font-weight: bold;" | Deposition Rate
! style="font-weight: bold;" | Substrate Temperature
! style="font-weight: bold;" | ConfomalityConformality
! style="font-weight: bold;" | Film Density
! style="font-weight: bold;" | Impurity Levels
| Very thin, very conformal films such as gate dieletrics, barriers, encapsulation
|}
 
===Chemical vapor deposition (CVD)===
===Thermal Oxidation===
*[[{{main|Thermal oxidation]]}}
==Figures of merit==
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