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Physical vapor deposition

No change in size, 6 years ago
Resistivity is typically used to measure the quality of the film in terms of source purity or vacuum purity but it can be changed by altering the density of the film (pressure, power and bias during sputtering)
===Step Coveragecoverage===
Step coverage is the measure of how much coating is on the bottom/sidewall of a feature vs how much coating is on the top/field areas. It is highly dependent on the geometry of the features.
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