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Optical lithography

No change in size, 6 years ago
===Adhesion promoter===
{{Hatnote|Equipment: [[Image Reversal Oven]]}}
[[HMDS]] may be manually applied to the sample, although the recommended method is using a vapor prime oven. In addition to the module in the [[ACS 200 cluster tool|ACS]], the [[Image reversal ovenReversal Oven]] can perform HMDS vapor prime for samples from small pieces up to a 25 6" wafers.
===Photoresist application===
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