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Dektak XT

1 byte added, 6 years ago
<!--A more general description of what the tool is capable of doing.-->
*The Dektak XT is capable of measuring profile step heights of ~ 500 Å to 150 μm.
**Although there are range settings of 524 μm and 1 mm on the tool, only step heights of up to 150 μm can be scanned. For heights above this, the stylus is not able to climb up the step and typically becomes stuck on the side of the profile, but the stage will continue to move which can damage the stylus, sensor head, and your sample. For steps taller than 150 umμm, the Zygo or LEXT 3D optical profilers should be used or there is also a height gauge located next to the Flexus stress measurement tool.
**Step height measurement accuracy for small steps becomes limited by noise floor and/or sample surface roughness. Based on step height repeatability measurements on a calibration check sample with 400 μm scan distance and 200 μm feature width, approximately +/-10% accuracy is expected for a 500 Å step.
*Vertical Resolution (@ each range setting):
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