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PVD 75 Proline

39 bytes added, 5 years ago
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{{infobox equipment
|restriction = [[{{PAGENAME}}#Material_Restrictions|Semi-Clean]]
|materials = [[Aluminum|Al]],[[Al2O3|Al<sub>2</sub>O<sub>3</sub>]],[[Chromium|Cr]],[[Copper|Cu]],[[Nickel|Ni]],[[Silicon|Si]],[[Silicon Dioxide|SiO<sub>2</sub>]], [[Silicon Nitride|Si<sub>3</sub>N<sub>4</sub>]],[[Silver|Ag]],[[Titanium|Ti]]
|mask =
|size = 150mm x 4mm and smaller samples
| 5000 Å / 1 µm
|--->
<!--| Silicon Dioxide ([[Silicon Dioxide|SiO<sub>2</sub>]])
| 5000 Å / 1 µm
|---><!--| Silicon Nitride ([[Silicon Nitride|Si<sub>3</sub>N<sub>4</sub>]])
| 5000 Å / 1 µm
|--->
<!--| Tantalum ([[Tantalum|Ta]])
| 2000 Å / NA
OnlineAccess, PhysicalAccess, Staff, StoreManager, StoreUser
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