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MA-BA-6 Mask-Bond Aligner

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|materials = [[Photoresist]]
|mask =4", 5", 7" mask plates
|size = 4" and 6" wafers. Pieces with staff approval
|chemicals = LNF approved photoresists
|gases =|overview = [[{{PAGENAME}}#System_Overview | https://drive.google.com/file/d/0B3k-qgz56T_4b2duZlYzSFNaNmc/view?usp=sharing&resourcekey=0-0fSam_yon_Y7uCxykeXDpA System Overview]]|sop = [https://docsdrive.google.com/a/lnf.umich.edu/documentfile/d/1fqWwTY2zI1o1NFhlDWI0ZVJ0lsMnCfwpj1QXhZApKyc0B3k-qgz56T_4a0JrTjR5N004d2s/preview SOP]|processes view?usp= [[{{PAGENAME}}/Processes|Supported Processes]]|maintenance sharing&resourcekey= [[{{PAGENAME}}#Maintenance | Maintenance]0-zjzn27ZsmH7-CnhV664jCw Topside Mask Alignment SOP]
}}
==System overview==
{{#widget:GoogleDoc|key=1lv9Fn5spwDrptJDpjkIkggPPx6GujKKS-S9dmdsItRw}}
===Hardware Details===
* Broadband light source calibrated to 20 mJ/sec at the 405 nm peak. Total broadband dose about ~30 mJ/sec
* 4" and 6" chucks
** Backside alignment piece chuck available with staff permission.
* 4", 5" and 7" mask holders
* Flood exposure, soft, hard, and vacuum contact capable (for details, see SOP)
* Capable of topside, backside and wafer to wafer alignment
* 10 mm stage travel, 150 mm microscope objective travel with split field view camera option
===Substrate requirements===
* Full 4" and 6" wafers standard** Pieces possible (pieces should use the [[MJB3-2|MJB3]] with tool engineer approvala 4" mask)
* Mounting may be necessary if wafer has thru holes, etc. Create helpdesk ticket for assistance
* Substrate thickness 200 µm to 4 mm possible
===Material restrictions===
{{material restrictions}}Allowed Materials - LNF approved photoresists Not Allowed Materials - Uncured PDMS and SU-8 (restricted w/out approval)
==Supported processes==
This tool is primarily used to expose photodefinable materials. The lamp output is calibrated to the 405 nm peak at 20 mJ/sec with <!-- We recommend creating a subpage detailing the supported processes for 5% uniformity across the tool, which will be generated if you leave the link below4” area. Alternatively, you may include the information on The 365 peak output is about half of this pageand tracks very well however is not routinely calibrated. In that case We allow 4” masks, the Supported Processes document from the equipment manual can be included here5” masks, 7” masks, transparencies, shadow masking, using {{#widget:GoogleDoc|key=googledocid}} -->or a manually timed flood exposure.
This tool is primarily used to expose photodefinable materials. The lamp output is calibrated to the 405 nm peak at 20 mJ/sec with 3% uniformity across the 4” area. The 365 peak output is about half of this and tracks very well however is not routinely calibrated. We allow 4” masks, 5” masks, 7” masks, transparencies, shadow masking, or just flood exposure. The tooling can also be changed out to provide wafer to wafer alignment for wafers that need to be aligned before bonding in the SB6-E.  Exposure of all LNF approved photoresists are allowed on this tool in accordance with standard operating procedure. More , for data on exposure times can be found on datasheet for the specific resist please see that resists wiki page, such as [[photoresistSPR 955]].
==Standard operating procedure==
* [https://drive.google.com/file/d/0B3k-qgz56T_4b2duZlYzSFNaNmc/view?usp=sharing&resourcekey=0-0fSam_yon_Y7uCxykeXDpA System Overview]* [https://drive.google.com/file/d/0B3k-qgz56T_4a0JrTjR5N004d2s/view?usp=sharing &resourcekey=0-zjzn27ZsmH7-CnhV664jCw Topside Mask Alignment SOP]* [https://drive.google.com/file/d/0B3k-qgz56T_4c1k4dEhvdlZfcnc/view?usp=sharing &resourcekey=0-pJyidlm-pXqJBdOoreSFMw Backside Mask Alignment SOP]
* For Bond Alignment please make a Helpdesk ticket
* [https://drive.google.com/file/d/0B3k-qgz56T_4Um5URGdYcl90eXM/view?usp=sharing&resourcekey=0-5nKwkOokCWra5e4sv6w50g Troubleshooting]
==Checkout procedure==
<!-- Describe the checkout procedure for the tool. For example: -->
# Read through the [https://drive.google.com/file/d/0B3k-qgz56T_4a0JrTjR5N004d2s/view?usp=sharing Standard Operating Procedure].
# Complete the [https://docs.google.com/a/lnf.umich.edu/forms/d/1L5TToo8m1ZaTqTK5p8UJ6gEcPR_8UFawA21pygwi_34/viewform SOP quiz]
# Create a [http://ssel-sched.eecs.umich.edu/sselScheduler/ResourceContact.aspx?tabindex=3&path=0:0:0:50020 Helpdesk Ticket] requesting training.
# A tool engineer will schedule a time for initial training.
# Practice with your mentor or another authorized user until you are comfortable with tool operation.
# Schedule a checkout session with a tool engineer via the helpdesk ticket system. If this checkout is successful, the engineer will authorize you on the tool.
 
 
 
==Maintenance== # Complete a [[Lithography training session]]. If you have already completed this for another tool, you do not need to complete it again.The UV energy at # Practice on the chuck face is routinely calibrated, so that tool with your mentor.# Read through the energy delivered corresponds to User Manual above.# Accurately complete the display on [https://docs.google.com/a/lnf.umich.edu/forms/d/1L5TToo8m1ZaTqTK5p8UJ6gEcPR_8UFawA21pygwi_34/viewform checkout quiz]. You may retake as necessary until all answers are correct.# Schedule a time for a checkout:## Find an available time for checkout [https://calendly.com/lnf-lithography/contact-aligner-checkout here].## Verify that the lamp controller. The energy delivered tool is 20 mJavailable in the [https:/sec at the 405 nm wavelength with an additional 9/ssel-10 mJsched.eecs.umich.edu/sselscheduler/sec ResourceDayWeek.aspx?Path=0-0-0-{{#var:toolid}} LNF Online Services] at the 365 nm wavelength (time you are requesting.## After confirmation that the 365 nm peak event is not calibratedscheduled in Calendly, but is constant in relation invite the staff member assigned to your event to the 405 nm peak)a Staff Support reservation at that time. Lamp uniformity is routinely calibrated to within 2# Create a [http://ssel-sched.eecs.umich.edu/sselScheduler/ResourceContact.aspx?tabindex=3% across the 150 mm range&path=0:0:0:{{#var:toolid}} helpdesk ticket] for final confirmation of your checkout appointment.The WEC (Wedge Error Compensation) head is completely rebuilt semi annually and checked monthly and adjusted as needed for level# Authorization will be provided pending demonstration of proper tool use in the presence of a tool engineer.
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