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MA-BA-6 Mask-Bond Aligner

466 bytes added, 1 year ago
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|size = 4" and 6" wafers
|chemicals = LNF approved photoresists
|overview = [https://drive.google.com/file/d/0B3k-qgz56T_4b2duZlYzSFNaNmc/view?usp=sharing &resourcekey=0-0fSam_yon_Y7uCxykeXDpA System Overview]|sop = [https://drive.google.com/file/d/0B3k-qgz56T_4a0JrTjR5N004d2s/view?usp=sharing &resourcekey=0-zjzn27ZsmH7-CnhV664jCw Topside Mask Alignment SOP]
}}
==Standard operating procedure==
* [https://drive.google.com/file/d/0B3k-qgz56T_4S0hvZVF0T0N1TjAqgz56T_4b2duZlYzSFNaNmc/view?usp=sharing 4" Automatic Loading &resourcekey=0-0fSam_yon_Y7uCxykeXDpA System Overview]* [https://drive.google.com/file/d/0B3k-qgz56T_4a0JrTjR5N004d2s/view?usp=sharing&resourcekey=0-zjzn27ZsmH7-CnhV664jCw Topside Mask Alignment SOP]* [https://drive.google.com/file/d/0B3k-qgz56T_4UWQzYVVPeEk3YWMqgz56T_4c1k4dEhvdlZfcnc/view?usp=sharing Job Setup Guidelines&resourcekey=0-pJyidlm-pXqJBdOoreSFMw Backside Mask Alignment SOP]* For Bond Alignment please make a Helpdesk ticket* [https://drive.google.com/file/d/0B3k-qgz56T_4Um5URGdYcl90eXM/view?usp=sharing&resourcekey=0-5nKwkOokCWra5e4sv6w50g Troubleshooting]
==Checkout procedure=Templates===*[https://drive.google.com/file/d/1m5_DQRaVm9qEPwBQ6RboSNIut_4L_ttJ/view?usp=sharing Global Key]*[https://drive.google.com/file/d/1moE5UbOBerdBDMWZm--BI8Eybhofp_ga/view?usp=sharing Global Key w/ Arrows]*[https://drive.google.com/file/d/1ZRz0zJAG7IjafPonjQpLvO9M7hXiP6aL/view?usp=sharing Layout] (5X Reduction)
Note: # Complete a [[Lithography training session]]. If you have questions about mask design please make a helpdesk ticket before making the maskalready completed this for another tool, you do not need to complete it again==Checkout procedure==<!-- Describe the checkout procedure for # Practice on the toolwith your mentor. For example: --># Read through the User Manual above.# Accurately complete the [https://drivedocs.google.com/filea/lnf.umich.edu/forms/d/0B3k-qgz56T_4a0JrTjR5N004d2s1L5TToo8m1ZaTqTK5p8UJ6gEcPR_8UFawA21pygwi_34/view?usp=sharing Standard Operating Procedureviewform checkout quiz].You may retake as necessary until all answers are correct.# Schedule a time for a checkout:# Complete the # Find an available time for checkout [https://docscalendly.googlecom/lnf-lithography/contact-aligner-checkout here].com## Verify that the tool is available in the [https:/a/lnfssel-sched.eecs.umich.edu/formssselscheduler/d/1L5TToo8m1ZaTqTK5p8UJ6gEcPR_8UFawA21pygwi_34/viewform SOP quizResourceDayWeek.aspx?Path=0-0-0-{{#var:toolid}} LNF Online Services]at the time you are requesting.## After confirmation that the event is scheduled in Calendly, invite the staff member assigned to your event to a Staff Support reservation at that time.# Create a [http://ssel-sched.eecs.umich.edu/sselScheduler/ResourceContact.aspx?tabindex=3&path=0:0:0:50020 Helpdesk Ticket{{#var:toolid}} helpdesk ticket] requesting trainingfor final confirmation of your checkout appointment.# A tool engineer Authorization will schedule a time for initial training.# Practice with your mentor or another authorized user until you are comfortable with be provided pending demonstration of proper tool operation.# Schedule a checkout session with use in the presence of a tool engineer via the helpdesk ticket system. If this checkout is successful, the engineer will authorize you on the tool.
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