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Acid Bench 73

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Acid Bench 73 is a wet bench used for working with [[:Category:Acid|acids]], mostly for [[Wet etching|etching]] and [[cleaning]] of samples that have had metals and/or polymers on them. It is considered a [[Metals]] class tool, so wafers with metal are allowed in the bench with some restrictions. It is intended for use with mixed materials and all substrate sizes up to 6 inches with the main focus being on piece parts.
==Announcements==
Acid Bench 73 is for wet processing of with piece parts, 4, and 6 inch samples of mixed materials. This includes III-V and II-VI materials, samples with polymers, and irregularly shaped samples.
* Feedback controlled hotplate
* Rinse tank can be run as either a [[Quick dump rinse]] (QDR) or [[Overflow]] overflow/cascade tank.
* Sink with goose neck
* Automated Bottle Wash
* Aspirator for chemical cleanup
==System overview==
===LNF Provided Chemicals allowed===* [[Acetic Acidacid|Acetic Acid (C<sub>2</sub>H<sub>4</sub>O<sub>2</sub>)]]
* [[Aluminum Etch|Aluminum Etch]]
* [[Buffered HF|Buffered HF (BHF)]]
* [[Hydrofluoric acid|Hydrofluoric acid (HF)]]
* [[Chromium Etch|Chromium Etch1020]]
* [[Hydrochloric acid|Hydrochloric acid (HCl)]]
* [[Hydrogen peroxide|Hydrogen peroxide (H<sub>2</sub>O<sub>2</sub>)]]
* [[Gold Etch|Gold EtchGE-8111]]
* [[Nanostrip|Nanostrip]]
* [[Nitric acid|Nitric acid (HNO<sub>3</sub>)]]
* [[Phosphoric Acidacid|Phosphoric Acid (H<sub>3</sub>OPO<sub>4</sub>P)]]
* [[Sulfuric acid|Sulfuric acid (H<sub>2</sub>SO<sub>4</sub>)]]
===Hardware details===
* Feedback control hot plate
* [[Quick dump rinse]] (QDR)/[[Cascade tank]]* Automatic [[Bottle Wash]]
* Sink with goose neck
* Open deck space
Working with chemicals can be very dangerous. Chemicals used at this bench are some of the most hazardous in the lab. To minimize the chance of accident, make sure you always:
*Wear personal protective equipment. Required PPE at this bench is an apron, face shield, and Trionic gloves.
*[http://lnf-wiki.eecs.umich.edu/wiki/LNF_Glove_Policy LNF Glove Policy]*Know the properties and hazards of chemicals you are working with. If you don’t know, find out by reading about them (review Safety Data Sheet (SDS)) or asking ask staff.
*Plan the details of your process. Before you start working, plan what quantities of chemicals and sample carriers you will use. Plan how you will rinse your sample and what you will do with any waste generated. Make sure you know how the controllers work.
*Do not use this bench without proper training.
*Waste from this bench goes into the LNF’s acid waste neutralization system and then to city sewers.
**No solvents can be used or disposed of here.
**Solutions which contains toxic materials that cannot be removed by neutralization (such as gold etch and chromium etch) should must not be aspirated or disposed of down the drain.
===Substrate requirements===
* [[Aluminum Etch|Aluminum Etch]]
* [[Aqua Regia|Aqua Regia]]
* [[BHFBuffered HF|BHF]]
* [[Chromium Etch|Chromium Etch]]
* [[Dilute HF (49% - 100:1 DI:HF)Hydrofluoric acid|Dilute HF]]
* [[Gold Etch|Gold Etch]]
* [[Nanostrip|Nanostrip]]
* [[Piranha Etch|Piranha Etch]]
{{#widget* [https:GoogleDoc|key//docs.google.com/document/d/1k80B6EGYPKdMVfGalNYDWM6k8DWNAIQOAiaxW7Y5gx0/edit?usp=1AduVT6p3tAV6EG-5MHiml61evDzBGSkPUws4AL0k1xw}}sharing RCA Clean]
If you wish to perform any other processes on this bench, they must be approved by a tool engineer. Please create a [http://ssel-sched.eecs.umich.edu/sselonline/?view=/sselScheduler/ResourceContact.aspx?tabindex=3&path=0:0:0:71231 helpdesk ticket] for assistance.
==Standard operating procedure==
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For a document version of the SOP, see below{{#widget:GoogleDoc|key=1OMOmAtD_8ezwLhNo2_KHl8ktVytkX_97HSV8_1E9Nbg1pLrVuX6vgnqKQnUe667W7PxQ3KjdElpmm93n3Q5qzzk}}
==Checkout procedure==
<!-- Describe the checkout procedure for the tool. For example: -->
Checkout on Acid Bench 73 also includes checkout [[Acid Bench 72]], and [[Acid Bench 82]]. Please be prepared for this when you reach steps 5 and 6.
# Take the [[General Wet Bench Training]], if you haven't already.
# Read through this page and the Standard Operating Procedure above.
# Practice with your mentor or another authorized user until you are comfortable with tool operation.
# Fill out [https://docs.google.com/forms/d/e/1FAIpQLScv9PDTq-3nFVrJf_9HG0xi7wZNZVCEVTcW-IhgWFhlnkds4g/viewform?usp=sf_link Process Information Form]. You will need to fill this out for each bench you plan on using.
# Complete the [https://docs.google.com/a/lnf.umich.edu/forms/d/1IwHwa3JEJGcszwkrxN2yk-TBiL1SU6uSMczmbZ72MMk/viewform 1440 Acid Bench quiz].
# Open a [http://ssel-sched.eecs.umich.edu/sselonline/?view=/sselScheduler/ResourceContact.aspx?tabindex=3&path=0:0:0:71231 helpdesk ticket] and request a checkout.
# A tool engineer will schedule a time for checkout.
# Complete the [https://docs.google.com/a/lnf.umich.edu/forms/d/1IwHwa3JEJGcszwkrxN2yk-TBiL1SU6uSMczmbZ72MMk/viewform 1440 Acid Bench quiz].
# If you pass the quiz the tool engineer will authorize you on the tool. If not you will be contacted to repeat.
==Maintenance==
<!-- Describe standard maintenance/qualification tests here -->
There are no staff maintained processes ===User Allowed===* If you break a nitrogen gun or tanks at this a DI water gun, go in the back service aisle to turn off the inlet to the bench.* Contact staff via Helpdesk system
OnlineAccess, PhysicalAccess, Staff, StoreManager, StoreUser
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