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MA-BA-6 Mask-Bond Aligner

502 bytes added, 1 year ago
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|size = 4" and 6" wafers
|chemicals = LNF approved photoresists
|overview = [https://drive.google.com/file/d/0B3k-qgz56T_4b2duZlYzSFNaNmc/view?usp=sharing &resourcekey=0-0fSam_yon_Y7uCxykeXDpA System Overview]|sop = [https://drive.google.com/file/d/0B3k-qgz56T_4a0JrTjR5N004d2s/view?usp=sharing &resourcekey=0-zjzn27ZsmH7-CnhV664jCw Topside Mask Alignment SOP]
}}
==Standard operating procedure==
* [https://drive.google.com/file/d/0B3k-qgz56T_4b2duZlYzSFNaNmc/view?usp=sharing &resourcekey=0-0fSam_yon_Y7uCxykeXDpA System Overview]* [https://drive.google.com/file/d/0B3k-qgz56T_4a0JrTjR5N004d2s/view?usp=sharing &resourcekey=0-zjzn27ZsmH7-CnhV664jCw Topside Mask Alignment SOP]* [https://drive.google.com/file/d/0B3k-qgz56T_4c1k4dEhvdlZfcnc/view?usp=sharing &resourcekey=0-pJyidlm-pXqJBdOoreSFMw Backside Mask Alignment SOP]
* For Bond Alignment please make a Helpdesk ticket
* [https://drive.google.com/file/d/0B3k-qgz56T_4Um5URGdYcl90eXM/view?usp=sharing &resourcekey=0-5nKwkOokCWra5e4sv6w50g Troubleshooting]
==Checkout procedure==
<!-- Describe the checkout procedure for the tool. For example: -->
# Complete a [[Lithography training session]]. If you have already completed this for another tool, you do not need to complete it again.
# Practice on the tool with your mentor.# Read through the User Manual above.# Accurately complete the [https://drivedocs.google.com/filea/lnf.umich.edu/forms/d/0B3k-qgz56T_4a0JrTjR5N004d2s1L5TToo8m1ZaTqTK5p8UJ6gEcPR_8UFawA21pygwi_34/view?usp=sharing Standard Operating Procedureviewform checkout quiz].You may retake as necessary until all answers are correct.# Schedule a time for a checkout:# Complete the # Find an available time for checkout [https://docscalendly.googlecom/lnf-lithography/contact-aligner-checkout here].com## Verify that the tool is available in the [https:/a/lnfssel-sched.eecs.umich.edu/formssselscheduler/d/1L5TToo8m1ZaTqTK5p8UJ6gEcPR_8UFawA21pygwi_34/viewform SOP quizResourceDayWeek.aspx?Path=0-0-0-{{#var:toolid}} LNF Online Services]at the time you are requesting.## After confirmation that the event is scheduled in Calendly, invite the staff member assigned to your event to a Staff Support reservation at that time.# Create a [http://ssel-sched.eecs.umich.edu/sselScheduler/ResourceContact.aspx?tabindex=3&path=0:0:0:50020 Helpdesk Ticket{{#var:toolid}} helpdesk ticket] requesting trainingfor final confirmation of your checkout appointment.# A tool engineer Authorization will schedule a time for initial training.# Practice with your mentor or another authorized user until you are comfortable with be provided pending demonstration of proper tool operation.# Schedule a checkout session with use in the presence of a tool engineer via the helpdesk ticket system. If this checkout is successful, the engineer will authorize you on the tool.
OnlineAccess, PhysicalAccess, Staff, StoreManager, StoreUser, Bureaucrats, Interface administrators, Administrators, Widget editors
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